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    2008
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Research Article
Open Access

Etch Defect Characterization and Reduction in Hard-Mask-Based Al Interconnect Etching

Hong-Ji Lee,  Che-Lun Hung,  Chia-Hao Leng,  Nan-Tzu Lian,  Ling-Wu Young,  Tahone Yang,  Kuang-Chao Chen,  Chih-Yuan Lu, 
  • First Published: 23 September 2008
Research Article
Open Access

Hollow Cathode and Low-Thrust Extraction Grid Analysis for a Miniature Ion Thruster

Richard Wirz,  Regina Sullivan,  JoHanna Przybylowski,  Mike Silva, 
  • First Published: 03 August 2008
Research Article
Open Access

FFT Analysis of a Series Loaded Resonant Converter-Based Power Supply for Pulsed Power Applications

R. B. Jadeja,  S. A. Kanitkar,  Anurag Shyam, 
  • First Published: 24 April 2008
Research Article
Open Access

Mass-Charge and Energy Spectra of Oxygen Ions in a Two-Element Laser-Produced Plasma

R. T. Khaydarov,  U. S. Kunishev, 
  • First Published: 14 February 2008
Research Article
Open Access

Microstructures Formation by Fluorocarbon Barrel Plasma Etching

A. El amrani,  R. Tadjine,  F. Y. Moussa, 
  • First Published: 21 November 2007
Research Article
Open Access

Observation and Modeling of Optical Emission Patterns and Their Transitions in a Penning Discharge

C. C. Klepper,  R. C. Hazelton,  F. Barakat,  M. D. Keitz,  J. P. Verboncoeur, 
  • First Published: 22 August 2007