The gas sensing and electrical properties of a novel toxic gas sensor structure based on n-InP epitaxial layer were studied. The gas sensing properties were investigated under extremely low concentration (in the ppb range) of toxic gas, nitrogen dioxide, in dry pure air. The sensor responses in terms of the resistance changes ΔR, towards NO₂ of the structures with different active InP layer thickness were compared. The influence of the surface states at InP surface on the initial resistance of the sensor structure was shown from numerical simulations. (© 2006 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)

References

[1] B. Adamowicz, M. Miczek, C. Brun, B. Gruzza, and H. Hasegawa, Thin Solid Films 436, 101 (2003).
10.1016/S0040-6090(03)00519-4
CAS Web of Science® Google Scholar
[2] V. Battut, J. P. Blanc, and C. Maleysson, Sens. Actuators B 44, 503 (1997).
10.1016/S0925-4005(97)00130-5
Web of Science® Google Scholar
[3] L. Talazac, J. Brunet, V. Battut, J. P. Blanc, A. Pauly, J. P. Germain, S. Pellier, and C. Soulier, Sen. Actuators B 76, 258 (2001).
10.1016/S0925-4005(01)00579-2
CAS Web of Science® Google Scholar
[4] K. Wierzbowska, Study of semiconductor surfaces for gas sensor application, M. Sc. Thesis (Silesian University of Technology, Gliwice, Poland, 2004).
Google Scholar
[5] L. Talazac, J. P. Blanc, J. P. Germain, and A. Pauly, Sens. Actuators B 59, 89 (1999).
10.1016/S0925-4005(99)00201-4
CAS Web of Science® Google Scholar
[6] B. Adamowicz, M. Miczek, K. B. Wierzbowska, and H. Hasegawa, in: Proceedings of Fall Meeting of the European Materials Research Society, Symposium A, Poster A-14 (Warsaw, Poland, 2004), Abstract p. 37.
Google Scholar
[7] L. Berry, J. Brunet, C. Varenne, L. Mazet, A. Pauly, and K. Wierzbowska, Communication, Eurosensors XIX, Barcelona (2005).
Google Scholar
[8] E. Comini, G. Faglia, and G. Sberveglieri, Sens. Actuators B 78, 73 (2001).
10.1016/S0925-4005(01)00796-1
CAS Web of Science® Google Scholar
[9] K. Wierzbowska, B. Adamowicz, L. Mazet, J. Brunet, A. Pauly, L. Bideux, C. Varenne, L. Berry, and J. P. Germain, Opt. Appl. 35, 655 (2005).
CAS Web of Science® Google Scholar
[10] J. F. Wager, W. H. Makky, C. W. Wilmsen, and L. G. Meiners, Thin Solid Films 95, 343 (1982).
10.1016/0040-6090(82)90040-2
CAS Web of Science® Google Scholar
[11] G. Hollinger, E. Bergignat, J. Joseph, and Y. Robach, J. Vac. Sci. Technol. A 3, 2082 (1985).
10.1116/1.572928
CAS Web of Science® Google Scholar
[12] L. L. Vereikna, Khim., in: Svoistva Metody Anal. Tugoplavkikh Soedin (USRR), edited by G. V. Sasonov (Naukova Dumka, Kiev, 1969), p. 37.
Google Scholar
[13] G. P. Shwartz, W. A. Sunder, and J. E. Giffiths, Appl. Phys. Lett. 37, 925 (1980).
10.1063/1.91861
Web of Science® Google Scholar
[14] O. R. Monteiro and J. W. Evans, J. Electrochem. Soc. 135, 2366 (1988).
10.1149/1.2096272
CAS Web of Science® Google Scholar
[15] H. Hasegawa and H. Ohno, J. Vac. Sci. Technol. B 4, 1130 (1986).
10.1116/1.583556
CAS Web of Science® Google Scholar
[16] H. Hasegawa, Mater. Sci. Forum 23, 185–188 (1995).
Web of Science® Google Scholar

Citing Literature

Volume203, Issue9

July 2006

Pages 2281-2286

Studies of gas sensing, electrical and chemical properties of n-InP epitaxial surfaces

Abstract

References

Citing Literature

References

Information

About Wiley Online Library

Help & Support

Opportunities

Connect with Wiley

Studies of gas sensing, electrical and chemical properties of n-InP epitaxial surfaces

Abstract

References

Citing Literature

References

Related

Information