Metrology of Three‐Dimensional Techniques in Focused Ion Beam Microscopy - 2nd International Congress on 3D Materials Science - Wiley Online Library

Metrology of Three-Dimensional Techniques in Focused Ion Beam Microscopy

H G Jones,

H G Jones

National Physical Laboratory, Hampton Road, Teddington, Middlesex, TW11 0LW, UK

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K P Mingard,

K P Mingard

National Physical Laboratory, Hampton Road, Teddington, Middlesex, TW11 0LW, UK

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D C Cox,

D C Cox

National Physical Laboratory, Hampton Road, Teddington, Middlesex, TW11 0LW, UK

Advanced Technology Institute, University of Surrey, Guildford, Surrey, GU2 7XH, UK

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B Winiarski,

B Winiarski

School of Materials, University of Manchester, Grosvenor Street, Manchester, M1 7HS, UK

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A Gholinia,

A Gholinia

School of Materials, University of Manchester, Grosvenor Street, Manchester, M1 7HS, UK

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H G Jones,

H G Jones

National Physical Laboratory, Hampton Road, Teddington, Middlesex, TW11 0LW, UK

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K P Mingard,

K P Mingard

National Physical Laboratory, Hampton Road, Teddington, Middlesex, TW11 0LW, UK

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D C Cox,

D C Cox

National Physical Laboratory, Hampton Road, Teddington, Middlesex, TW11 0LW, UK

Advanced Technology Institute, University of Surrey, Guildford, Surrey, GU2 7XH, UK

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B Winiarski,

B Winiarski

School of Materials, University of Manchester, Grosvenor Street, Manchester, M1 7HS, UK

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A Gholinia,

A Gholinia

School of Materials, University of Manchester, Grosvenor Street, Manchester, M1 7HS, UK

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Book Editor(s):Dominique Bernard,

Dominique Bernard

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Jean-Yves Buffière,

Jean-Yves Buffière

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Tresa Pollock,

Tresa Pollock

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Henning Friis Poulsen,

Henning Friis Poulsen

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Anthony Rollett,

Anthony Rollett

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Michael Uchic,

Michael Uchic

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First published: 14 July 2014

https://doi.org/10.1002/9781118990278.ch19

Summary

This chapter contains sections titled:

Introduction
Experimental Method
Results and Analysis
Discussion
Conclusion
Acknowledgements

References

2nd International Congress on 3D Materials Science