Volume 18, Issue 7 2200399
Research Article

Lattice-Asymmetry-Driven Selective Area Sublimation: A Promising Strategy for III-Nitride Nanostructure Tailoring

Shanshan Sheng

Shanshan Sheng

State Key Laboratory for Mesoscopic Physics and Frontiers Science Center for Nano-optoelectronics, School of Physics, Peking University, Beijing, 100871 P. R. China

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Duo Li

Duo Li

State Key Laboratory for Mesoscopic Physics and Frontiers Science Center for Nano-optoelectronics, School of Physics, Peking University, Beijing, 100871 P. R. China

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Ping Wang

Ping Wang

State Key Laboratory for Mesoscopic Physics and Frontiers Science Center for Nano-optoelectronics, School of Physics, Peking University, Beijing, 100871 P. R. China

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Tao Wang

Tao Wang

Electron Microscopy Laboratory, School of Physics, Peking University, Beijing, 100871 P. R. China

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Fang Liu

Fang Liu

State Key Laboratory for Mesoscopic Physics and Frontiers Science Center for Nano-optoelectronics, School of Physics, Peking University, Beijing, 100871 P. R. China

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Zhaoying Chen

Zhaoying Chen

State Key Laboratory for Mesoscopic Physics and Frontiers Science Center for Nano-optoelectronics, School of Physics, Peking University, Beijing, 100871 P. R. China

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Renchun Tao

Renchun Tao

State Key Laboratory for Mesoscopic Physics and Frontiers Science Center for Nano-optoelectronics, School of Physics, Peking University, Beijing, 100871 P. R. China

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Weikun Ge

Weikun Ge

State Key Laboratory for Mesoscopic Physics and Frontiers Science Center for Nano-optoelectronics, School of Physics, Peking University, Beijing, 100871 P. R. China

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Bo Shen

Bo Shen

State Key Laboratory for Mesoscopic Physics and Frontiers Science Center for Nano-optoelectronics, School of Physics, Peking University, Beijing, 100871 P. R. China

Collaborative Innovation Center of Quantum Matter, School of Physics, Peking University, Beijing, 100871 P. R. China

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Xinqiang Wang

Corresponding Author

Xinqiang Wang

State Key Laboratory for Mesoscopic Physics and Frontiers Science Center for Nano-optoelectronics, School of Physics, Peking University, Beijing, 100871 P. R. China

Collaborative Innovation Center of Quantum Matter, School of Physics, Peking University, Beijing, 100871 P. R. China

Peking University Yangtze Delta Institute of Optoelectronics, Nantong, Jiangsu, 226010 P. R. China

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First published: 19 April 2023

Abstract

Lattice-asymmetry-driven selective area sublimation (SAS) process of GaN is systemically investigated by exploring the in situ dynamic evolution of the decomposition pathway under ultra-high vacuum. The rationale of the SAS is confirmed as a strong anisotropic decomposition driven by lattice-asymmetry of wurtzite crystal: the sublimation preferably starts along the -c axis due to the relatively lower decomposition energy barrier. Finally, the fabrication of site- and size-controlled GaN nanowires has been achieved by utilizing the SAS process, exhibiting good controllability on the sidewall of nanowires. These findings shed light on the thermodynamic mechanism of the lattice-asymmetry-driven sublimation process in III-nitrides, providing an efficient alternative approach for the tailoring of semiconductor micro/nanostructures.

Conflict of Interest

The authors declare no conflict of interest.

Data Availability Statement

The data that support the findings of this study are available from the corresponding author upon reasonable request.

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