Improved Electron Transport Properties of Ga1–xInxSb Quantum Well Channel Using Strained-Al0.40In0.60Sb/Al1–yInySb Stepped Buffer
Abstract
Unstrained Ga1–xInxSb quantum well (QW) channel using strained-Al0.40In0.60Sb/Al1–yInySb stepped buffer layer grown on GaAs (100) substrate is investigated. Ga1–xInxSb QW is lattice-matched to the Al1–yInySb lower buffer layer. Sheet electron density (Ns) of Ga1–xInxSb QW is about twice that of InSb one. Electron mobility (μ) increases with increasing In content x of Ga1–xInxSb. Unstrained Ga0.22In0.78Sb QW channel using strained-Al0.40In0.60Sb/Al0.25In0.75Sb stepped buffer has Ns of 2.05 × 1012 cm−2 and μ of 15 500 cm2 V−1 s−1. Compared with the InSb QW channel, Ns increases by a factor of 193% and μ decreases to 87%. Consequently, the sheet resistance decreases to 59%. These results indicate that the unstrained Ga1–xInxSb QW channel using strained-Al0.40In0.60Sb/Al1–yInySb stepped buffer is effective to improve the electron transport properties.
Conflict of Interest
The authors declare no conflict of interest.