Mis, Mim, and Msm Structures
Durgamadhab Misra,
Durgamadhab Misra
New Jersey Institute of Technology, Newark, NJ
Search for more papers by this authorDurgamadhab Misra,
Durgamadhab Misra
New Jersey Institute of Technology, Newark, NJ
Search for more papers by this authorFirst published: 27 December 1999
Abstract
The sections in this article are
- 1 Device Characterization
- 2 Device Fabrication
- 3 Polarity Dependence
- 4 Immunity from Plasma Damage
- 5 Summary
- 6 Acknowledgment
Bibliography
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Wiley Encyclopedia of Electrical and Electronics Engineering
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