Data-reduction procedure for correction of geometric factors in the analysis of specular X-ray reflectivity of small samples

For small samples, the modification of the X-ray reflectivity (XRR) profile by the geometric factors due to the profile and size of the beam and the size of the sample is significant. These geometric factors extend the spill-over angle, which is often greater than the critical angle for small samples. To separate the geometric factors, it is necessary to know the spill-over angle. Since the geometric factors are smoothly varying functions and extend beyond the critical angle, it is impossible to determine the spill-over angle from the XRR profile of small samples. It is shown that the spill-over angle can be determined by comparing the normal XRR profile of a small sample with the XRR profile taken with a surface-contact knife edge on the same sample. Thus, a procedure has been developed for data reduction for small samples and validated with suitable experiments. Unlike the methods used hitherto, which have drawbacks, this is a self-consistent method for data reduction.