IEEJ Transactions on Electrical and Electronic Engineering

Volume 12, Issue S2 pp. S141-S142

Letter

High-aspect-ratio aluminum-doped zinc oxide nanomechanical resonator

Nguyen Van Toan,

Corresponding Author

Nguyen Van Toan

Non-member

[email protected]

Graduate School of Engineering, Tohoku University, 6-6-01 Aramaki-Aza-Aoba, Aoba-ku,, Sendai, 980-8579 Japan

Correspondence to: Nguyen Van Toan. E-mail: [email protected]Search for more papers by this author

Naoki Inomata,

Naoki Inomata

Member

Graduate School of Engineering, Tohoku University, 6-6-01 Aramaki-Aza-Aoba, Aoba-ku,, Sendai, 980-8579 Japan

Search for more papers by this author

Takahito Ono,

Takahito Ono

Senior Member

Graduate School of Engineering, Tohoku University, 6-6-01 Aramaki-Aza-Aoba, Aoba-ku,, Sendai, 980-8579 Japan

Search for more papers by this author

Nguyen Van Toan,

Corresponding Author

Nguyen Van Toan

Non-member

[email protected]

Graduate School of Engineering, Tohoku University, 6-6-01 Aramaki-Aza-Aoba, Aoba-ku,, Sendai, 980-8579 Japan

Correspondence to: Nguyen Van Toan. E-mail: [email protected]Search for more papers by this author

Naoki Inomata,

Naoki Inomata

Member

Graduate School of Engineering, Tohoku University, 6-6-01 Aramaki-Aza-Aoba, Aoba-ku,, Sendai, 980-8579 Japan

Search for more papers by this author

Takahito Ono,

Takahito Ono

Senior Member

Graduate School of Engineering, Tohoku University, 6-6-01 Aramaki-Aza-Aoba, Aoba-ku,, Sendai, 980-8579 Japan

Search for more papers by this author

First published: 08 December 2017

https://doi.org/10.1002/tee.22561

Share a link

Email
Wechat
Bluesky

Abstract

This paper reports on the patterning of a high-aspect-ratio aluminum-doped zinc oxide (AZO) capacitive resonator based on the combination of the deep reactive ion etching (deep RIE) and atomic layer deposition (ALD) processes. The suspended AZO capacitive resonator is successfully demonstrated. Its resonant frequency is observed at 10.4 kHz with a quality factor (Q factor) of approximately 500 in a vacuum chamber.

References

1Desai AV, Haque MA. Mechanical properties of ZnO nanowires. Sensor and Actuators A: Physical 2007; 134: 169–176.
10.1016/j.sna.2006.04.046
CAS Web of Science® Google Scholar
2Wang ZL. Progress in piezotronics and piezo-phototronics. Advanced Materials 2012; 24: 4632–4646.
10.1002/adma.201104365
CAS PubMed Web of Science® Google Scholar
3Ralib AAM, Nordin AN. Comparative analysis of zinc oxide and aluminium doped ZnO for GHz CMOS MEMS surface acoustic wave resonator. Proceedings of Design, Test, Intergration and Packaging of MEMS/MOEMS (DTIP), Barcelona, Spain, vol. 9, 2013; 1–6.
Google Scholar
4Ralib AAM, Nordin AN, Salleh H, Othman R. Fabrication of aluminum doped zinc oxide piezoelectric thin film on a silicon substrate for piezoelectric MEMS energy harvesters. Microsystem Technology 2012; 18: 1761–1769.
10.1007/s00542-012-1550-9
Web of Science® Google Scholar
5Lee KK, Lou Y, Lu X, Bao P, Song AM. Development of reactive ion etching for ZnO based nanodevice. IEEE Transactions on Nanotechnology 2011; 10: 839–843.
10.1109/TNANO.2010.2085013
Web of Science® Google Scholar
6Toan NV, Miyashita H, Toda M, Kawai Y, Ono T. Fabrication of an hermetically packaged silicon resonator on LTCC substrate. Microsystem Technologies 2013; 19: 1165–1175.
10.1007/s00542-012-1716-5
CAS Web of Science® Google Scholar
7Inomata N, Toda M, Sato M, Ishijima A, Ono T. Pico calorimeter for detection of heat produced in an individual brown fat cell. Applied Physics Letter 2012; 100: 154104.
10.1063/1.3701720
CAS Web of Science® Google Scholar
8Rips S, Hartmann MJ. Quantum information processing with nanomechanical qubits. Physical Review Letters 2013; 111: 049905.
10.1103/PhysRevLett.111.049905
Web of Science® Google Scholar
9Toan NV, Kubota T, Sekhar H, Samukawa S, Ono T. Mechanical quality factor enhancement in a silicon micromechanical resonator by low-damage process using neutral beam etching technology. Journal of Micromechanics and Microengineering 2014; 24: 085005.
10.1088/0960-1317/24/8/085005
Web of Science® Google Scholar

Volume12, IssueS2

December 2017

Pages S141-S142

High-aspect-ratio aluminum-doped zinc oxide nanomechanical resonator

Abstract

References

References

Information

About Wiley Online Library

Help & Support

Opportunities

Connect with Wiley

High-aspect-ratio aluminum-doped zinc oxide nanomechanical resonator

Abstract

References

References

Related

Information