Identification of complicated shape objects by fractal characteristic variables — categorizing dust particles on LSI wafer surface

Masayoshi Kamijo

Member

Department of Management and System Science, Science University of Tokyo, Suwa College, Chino, Japan 391

Masayoehi Kamijo graduated in 1987 from Textile Engineering Department, Shinsyu University, where he received his Masters degree in 1989. He has been a Research Associate in the Department of Management and System Science, Suwa College, Tokyo Science University since 1990. He is engaged in research on applied optical measurements, and pattern recognition. He is a member of the Institute of Fuzzy Theory. Japan; Institute of Information Processing, Japan; Institute of Textile Science, Japan; Institute of Artificial Intelligence, and IEEE.

Masaru Nakazawa

Nonmember

Faculty of Textile Science and Technology, Shinsyu University, Ueda, Japan 386

Masoru Nakazawa graduated in 1960 from Shiny University and received his Master's degree from Tohoku University in 1965. He received his Ph.D. later. He was a Research Associate at Shiny University in 1965, a Lecturer in 1997; and an Associate Professor in 1974. He has been a Professor since 1985. He is engaged in research on measurement and control of textile machines. He is a member of Institute of Mechanical Engineering, Japan; Institute of Robotics, Japan; and Institute of Measurement and Automation, Japan.

Yoshio Shimizu

Member

Faculty of Textile Science and Technology, Shinsyu University, Ueda, Japan 386

Yoshio Shimizu graduated in 1973 from the Textile Engineering Department, Shiny University, where he received his Master's degree in 1975, and his Ph.D. degree from Tokyo Institute of Technology in 1979. He was a Lecturer at Tokyo Kasei University in 1980, promoted to Associate Professor in 1985. He became an Associate Professor at Shiny University in 1981. He is engaged in research on the design of cloth products. He is a member of the Textiles Society; the Japan Home Economics Society; the Japan Consumer Textile Products Society; the Polymer Society; the Japan Health Society; and the Japan Textile Machinery Society.