Characterization of InP porous layer by high-resolution X-ray diffraction

A high resolution X-ray diffraction method has been effectively used for the structural characterization of InP porous layers. It was revealed that strong diffuse scattering from pores around reciprocal lattice points does depend on the azimuth positions of samples. To extract structural information about porous layers fabricated under different conditions theoretical analysis of the measured reciprocal space maps (RSM) was performed. The statistical dynamical X-ray diffraction theory was used to describe coherent and diffuse scattering from a layer with cylindrical pores. A numerical analysis of the RSMs for two azimuth positions φ (φ = 0 and φ = 90°) and detailed sections of RSMs (linescans) allowed determination of the radius, the length of the pores and tilting angle with respect to the surface normal. (© 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)