A Simple Model for Ion Flux-Energy Distribution Functions in Capacitively Coupled Radio-Frequency Plasmas Driven by Arbitrary Voltage Waveforms
Corresponding Author
Edmund Schüngel
Department of Physics, West Virginia University, Morgantown, West Virginia, 26506-6315 USA
Evatec AG, Hauptstrasse 1a, Trübbach, CH-9477 Switzerland
Search for more papers by this authorZoltán Donkó
Wigner Research Centre for Physics, Institute for Solid State Physics and Optics, Hungarian Academy of Sciences, Konkoly-Thege Miklós str. 29-33, Budapest, 1121 Hungary
Search for more papers by this authorJulian Schulze
Department of Physics, West Virginia University, Morgantown, West Virginia, 26506-6315 USA
Institute for Electrical Engineering, Ruhr-University Bochum, Bochum, 44780 Germany
Search for more papers by this authorCorresponding Author
Edmund Schüngel
Department of Physics, West Virginia University, Morgantown, West Virginia, 26506-6315 USA
Evatec AG, Hauptstrasse 1a, Trübbach, CH-9477 Switzerland
Search for more papers by this authorZoltán Donkó
Wigner Research Centre for Physics, Institute for Solid State Physics and Optics, Hungarian Academy of Sciences, Konkoly-Thege Miklós str. 29-33, Budapest, 1121 Hungary
Search for more papers by this authorJulian Schulze
Department of Physics, West Virginia University, Morgantown, West Virginia, 26506-6315 USA
Institute for Electrical Engineering, Ruhr-University Bochum, Bochum, 44780 Germany
Search for more papers by this authorAbstract
The ion flux-energy distribution function (IFEDF) is of crucial importance for surface processing applications of capacitively coupled radio-frequency (CCRF) plasmas. Here, we propose a model that allows for the determination of the IFEDF in such plasmas for various gases and pressures in both symmetric and asymmetric configurations. A simplified ion density profile and a quadratic charge voltage relation for the plasma sheaths are assumed in the model, of which the performance is evaluated for single- as well as multi-frequency voltage waveforms. The IFEDFs predicted by this model are compared to those obtained from PIC/MCC simulations and retarding field energy analyzer measurements. Furthermore, the development of the IFEDF shape and the ion dynamics in the plasma sheath region are discussed in detail based on the spatially and temporally resolved model data.
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