Free C2F4 Jet Deposition of Thin PTFE-like Films
Corresponding Author
Aleksei K. Rebrov
Institute of Thermophysics SB RAS, av. Lavrentyev 1, Novosibirsk 630090, Russia
Institute of Thermophysics SB RAS, av. Lavrentyev 1, Novosibirsk 630090, Russia. Fax: 7 (3832) 308480Search for more papers by this authorRustam S. Sharafudinov
Institute of Thermophysics SB RAS, av. Lavrentyev 1, Novosibirsk 630090, Russia
Search for more papers by this authorAndrey V. Shishkin
Institute of Thermophysics SB RAS, av. Lavrentyev 1, Novosibirsk 630090, Russia
Search for more papers by this authorNikolai I. Timoshenko
Institute of Thermophysics SB RAS, av. Lavrentyev 1, Novosibirsk 630090, Russia
Search for more papers by this authorCorresponding Author
Aleksei K. Rebrov
Institute of Thermophysics SB RAS, av. Lavrentyev 1, Novosibirsk 630090, Russia
Institute of Thermophysics SB RAS, av. Lavrentyev 1, Novosibirsk 630090, Russia. Fax: 7 (3832) 308480Search for more papers by this authorRustam S. Sharafudinov
Institute of Thermophysics SB RAS, av. Lavrentyev 1, Novosibirsk 630090, Russia
Search for more papers by this authorAndrey V. Shishkin
Institute of Thermophysics SB RAS, av. Lavrentyev 1, Novosibirsk 630090, Russia
Search for more papers by this authorNikolai I. Timoshenko
Institute of Thermophysics SB RAS, av. Lavrentyev 1, Novosibirsk 630090, Russia
Search for more papers by this authorAbstract
Summary: This work studied the possibility of thin PTFE-like film deposition, from a supersonic jet of PTFE decomposition products down to the monomer state. One of the most important features of gas-jet deposition is the use of a monomer gas as a precursor with its polymerization on a surface. Under certain conditions, partial polymerization is possible in an adiabatically expanding supersonic jet. Another important feature of this method is the unique possibility of controlling the deposition process by changing parameters of the gas flow and the state of the substrate.
Structure of a PTFE-like film obtained from a He-C2F4 jet.
References
- 1 I. I. Bondar, N. P. Dubinin, L. M. Gert, D. S. Gornyi, Poverkhn. Fiz. Khim. Mekh. 1983, 7, 44.
- 2 V. P. Kazachenko, A. V. Rogachev, High Energy Chem. 1999, 34, 270.
- 3 A. Pique, R. A. McGill, D. B. Chrisey, D. Leonhardt, T. E. Mslna, B. J. Spargo, J. H. Callahan, R. W. Vachet, R. Chung, M. A. Bucaro, Thin Solid Films. 1999, 356, 536.
- 4 C. Biloiu, I. A. Biloiu, Y. Sakai, Y. Suda, A. Ohta, J. Vac. Sci. Technol. A 2004, 22, 13.
- 5 J. H. Correll, Plast. Technol. 1964, 10, 45.
- 6 K. K. S. Lau, S. K. Murthy, H. G. P. Lewis, J. Fluorine Chem. 2003, 122, 93.
- 7 G. Cicala, A. Milella, F. Palumbo, P. Rossini, P. Favia, R. d'Agostino, Macromolecules 2002, 35, 8920.
- 8 A. Milella, F. Palumbo, P. Favia, G. Cicala, R. d'Agostino, Plasma Process. Polym. 2004, 1, 164.
- 9 A. K. Rebrov, J. Vac. Sci. Technol. A 2001, 19, 1679.
- 10 A. K. Rebrov, “ Vacuum Technologies and Equipment”, in: Proc. 4th Int. Symp. “Vacuum Technologies and Equipmen” (ISVTE–4), April 23–27, 2001, Kharkov, Ukraine 2001, p. 6.
- 11 A. K. Rebrov, “ On Gas Dynamic Structure of High Pressure Low Density Jets”, in: Problems of Thermophysics and Physical Hydrodynamics, Nauka, Novosibirsk 1974, p. 262.
- 12 H. Z. Ashkenas, F. S. Sherman, Rarefied Gas Dyn. 1964, 84.
- 13 AIP Conf. Proc., Vol. 585, T. J. Bartel, M. A. Gallis, Eds., AIP, Melville 2001.
- 14 S. L. Madorsky, “ Thermal Degradation of Organic Polymers”, Interscience Publishers, J. Wiley, 1964.
- 15 E. E. Lewis, M. A. Naylor, J. Am. Chem. Soc. 1947, 69, 1968.
- 16 L. M. Sverdlov, M. A. Kovner, E. P. Kraynov, “ Oscillatory Spectra of Polyatomic Molecules”, Nauka, Gl. red. phis.-mat. lit., Moscow 1970.
- 17 “ Comprehensive Chemical Kinetics. Vol. 3. The Formation and Decay of Excited Species”, C. H. Bamford, C. F. H. Tipper, Eds., Elsevier, Amsterdam 1969.
- 18 B. B. Mandelbrot, “ The Fractal Geometry of Nature”, W. H. Freeman and Company, San Francisco 1982.
- 19 H. Usui, H. Koshikawa, K. Tanaka, J. Vac. Sci. Technol. A 1995, 13, 2318.
- 20 “ Sprouse Collection of Infrared Spectra. Book I: Polymers”, Sprouse Scientific Systems, Paoli, Inc., Pennsylvania 1987, p. 96.
- 21 N. P. G. Roeges, “ A Guide to the Complete Interpretation of Infrared Spectra of Organic Structures”, Wiley, New York 1994.
- 22 “ Infrared Characteristic Group Frequencies. Tables and Charts”, 2nd edition, G. Socrates, Ed., J. Wiley & Sons, Chichester 1994.
- 23 K. Takahashi, K. Tachibana, J. Vac. Sci. Technol. A 2002, 20, 305.
- 24 N. Takada, K. Shibagaki, K. Sasaki, K. Kadota, K. I. Oyama, J. Vac. Sci. Technol. A 2001, 19, 689.
- 25 J. J. Senkevich, D. W. Sherer, J. Vac. Sci. Technol. A 2000, 18, 377.
- 26 S. Agraharam, D. W. Hess, P. A. Kohl, S. A. B. Allen, J. Vac. Sci. Technol. A 1999, 17, 3265.
- 27 S. Limb, K. Gleason, D. J. Edell, E. F. Gleason, J. Vac. Sci. Technol. A 1997, 15, 1814.
- 28 M. Inayoshi, M. Hori, T. Goto, M. Hiramatsu, M. Nawata, S. Hattori, J. Vac. Sci. Technol. A 1996, 14, 1981.
- 29 G. B. Blanchet, Appl. Phys. Lett. 1993, 62, 479.
- 30
R. d'Agostino,
F. Cramarossa,
F. Fracassi,
F. Illuzzi, in:
“ Plasma Deposition, Treatment and Etching of Polymers”,
R. d'Agostino, Ed.,
Academic,
San Diego
1990, p.
95.
10.1016/B978-0-12-200430-8.50008-7 Google Scholar
