Volume 67, Issue 6 e70290
RESEARCH ARTICLE

Properties in the Barrier-Type He+-Implanted Dy:Lu2Si2O7 Waveguide

Bin Yang

Bin Yang

College of Electronic and Optical Engineering, Nanjing University of Posts and Telecommunications, Nanjing, China

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Ya-Nan Miao

Ya-Nan Miao

College of Electronic and Optical Engineering, Nanjing University of Posts and Telecommunications, Nanjing, China

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Ze-Ang Li

Ze-Ang Li

College of Electronic and Optical Engineering, Nanjing University of Posts and Telecommunications, Nanjing, China

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Hao-Zhe Chen

Hao-Zhe Chen

College of Electronic and Optical Engineering, Nanjing University of Posts and Telecommunications, Nanjing, China

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Jia-Pei Wu

Jia-Pei Wu

College of Electronic and Optical Engineering, Nanjing University of Posts and Telecommunications, Nanjing, China

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Jie Zhao

Jie Zhao

College of Electronic and Optical Engineering, Nanjing University of Posts and Telecommunications, Nanjing, China

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Chun-Xiao Liu

Corresponding Author

Chun-Xiao Liu

College of Electronic and Optical Engineering, Nanjing University of Posts and Telecommunications, Nanjing, China

Correspondence: Chun-Xiao Liu ([email protected])

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Liao-Lin Zhang

Liao-Lin Zhang

School of Material Science and Engineering, Jiangxi University of Science and Technology, Ganzhou, China

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First published: 25 June 2025

ABSTRACT

Dy:Lu2Si2O7 has great potential in applications for optical devices and systems. This study reports on the formation of planar waveguides on the Dy:Lu2Si2O7 crystal through helium ion implantation. The energy and dose of the He+-ion implantation are 400 keV and 6 × 1016 ions/cm2, respectively. The energy loss distribution caused by the irradiation in the Dy:Lu2Si2O7 was calculated using SRIM 2013 to investigate the physical mechanism of waveguide formation. The optical microscope image of the waveguide cross-section was captured using a Nikon microscope. The prism coupler was used to record the spectrum of propagating modes from which the refractive index of the waveguide could be obtained based on the reflective calculation method. The guiding properties of light in the waveguide were studied using an end-fire coupling system. The results, including the core refractive index of 1.7477 and the propagation loss of 2.2 dB/cm at 632.8 nm, have potential applications in the development of optical waveguide devices.

Data Availability Statement

The data that support the findings of this study are available from the corresponding author upon reasonable request.

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