A novel fabrication technique of FBAR devices for mobile broadband WiMAX applications

In this study, we present a novel fabrication technique of FBAR devices as a feasibility study for mobile broadband WiMAX applications. This novel technique features the formation of very thin-film Cr adhesion layers between W and SiO₂ film layers in the Bragg reflectors, particularly to enhance the adhesion in-between. As a result, the resonances were found to occur at 2.7–3.0 GHz. In addition, excellent resonance characteristics were achieved in terms of return loss and Q-factor. This finding indicates that the proposed fabrication technique can be useful for the future mobile WiMAX applications. © 2007 Wiley Periodicals, Inc. Microwave Opt Technol Lett 50: 375–378, 2008; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.23088