Volume 19, Issue 6 2205680
Review
Open Access

Solid-State Nanopore Array: Manufacturing and Applications

Hongshuai Liu

Hongshuai Liu

Centre of Micro/Nano Manufacturing Technology (MNMT-Dublin), School of Mechanical and Materials Engineering, University College Dublin, Dublin, D04 V1W8 Ireland

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Qin Zhou

Qin Zhou

College of Basic Medicine, Harbin Medical University, No. 157 Baojian Road, Nangang District, Harbin, Heilongjiang, 150081 China

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Wei Wang

Wei Wang

School of Mechanical and Electrical Engineering, University of Electronic Science and Technology of China, 2006 Xiyuan Ave, Chengdu, Sichuan, 611731 China

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Fengzhou Fang

Corresponding Author

Fengzhou Fang

Centre of Micro/Nano Manufacturing Technology (MNMT-Dublin), School of Mechanical and Materials Engineering, University College Dublin, Dublin, D04 V1W8 Ireland

State Key Laboratory of Precision Measuring Technology and Instruments, Laboratory of Micro/Nano Manufacturing Technology (MNMT), Tianjin University, Tianjin, 300072 China

E-mail: [email protected]; [email protected]

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Jufan Zhang

Corresponding Author

Jufan Zhang

Centre of Micro/Nano Manufacturing Technology (MNMT-Dublin), School of Mechanical and Materials Engineering, University College Dublin, Dublin, D04 V1W8 Ireland

E-mail: [email protected]; [email protected]

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First published: 05 December 2022
Citations: 5

Abstract

Nanopore brings extraordinary properties for a variety of potential applications in various industrial sectors. Since manufacturing of solid-state nanopore is first reported in 2001, solid-state nanopore has become a hot topic in the recent years. An increasing number of manufacturing methods have been reported, with continuously decreased sizes from hundreds of nanometers at the beginning to ≈1 nm until recently. To enable more robust, sensitive, and reliable devices required by the industry, researchers have started to explore the possible methods to manufacture nanopore array which presents unprecedented challenges on the fabrication efficiency, accuracy and repeatability, applicable materials, and cost. As a result, the exploration of fabrication of nanopore array is still in the fledging period with various bottlenecks. In this article, a wide range of methods of manufacturing nanopores are summarized along with their achievable morphologies, sizes, inner structures for characterizing the main features, based on which the manufacturing of nanopore array is further addressed. To give a more specific idea on the potential applications of nanopore array, some representative practices are introduced such as DNA/RNA sequencing, energy conversion and storage, water desalination, nanosensors, nanoreactors, and dialysis.

Conflict of Interest

The authors declare no conflict of interest.

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