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Free Access
Zinc Oxide: From Precursor Chemistry to Gas Sensors: Plasma-Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications (Small 22/2020)
First published: 04 June 2020
Graphical Abstract
In article number 1907506, Anjana Devi and co-workers introduce a new, nonpyrophoric zinc precursor for plasma enhanced atomic layer deposition (PEALD) of zinc oxide (ZnO). Here, oxygen plasma is used to react with adsorbed zinc precursor on chemiresistor structures to form highly pure ZnO which is used effectively as a selective gas sensing layer for NO2 in a functional gas sensor device.
