Volume 15, Issue 5 2170022
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On the Origin of Wake-Up and Antiferroelectric-Like Behavior in Ferroelectric Hafnium Oxide

Maximilian Lederer

Corresponding Author

Maximilian Lederer

Fraunhofer IPMS, Center Nanoelectronic Technologies, 01109 Dresden, Germany

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Ricardo Olivo

Ricardo Olivo

Fraunhofer IPMS, Center Nanoelectronic Technologies, 01109 Dresden, Germany

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David Lehninger

David Lehninger

Fraunhofer IPMS, Center Nanoelectronic Technologies, 01109 Dresden, Germany

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Sukhrob Abdulazhanov

Sukhrob Abdulazhanov

Fraunhofer IPMS, Center Nanoelectronic Technologies, 01109 Dresden, Germany

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Thomas Kämpfe

Thomas Kämpfe

Fraunhofer IPMS, Center Nanoelectronic Technologies, 01109 Dresden, Germany

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Sven Kirbach

Sven Kirbach

Fraunhofer IPMS, Center Nanoelectronic Technologies, 01109 Dresden, Germany

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Clemens Mart

Clemens Mart

Fraunhofer IPMS, Center Nanoelectronic Technologies, 01109 Dresden, Germany

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Konrad Seidel

Corresponding Author

Konrad Seidel

Fraunhofer IPMS, Center Nanoelectronic Technologies, 01109 Dresden, Germany

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Lukas M. Eng

Lukas M. Eng

Institut für Angewandte Physik, Technische Universität Dresden, 01187 Dresden, Germany

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First published: 17 May 2021

Graphical Abstract

With the help of transmission Kikuchi diffraction the major physical mechanism of antiferroelectric-like behavior as well as of the wake-up effect is determined by Maximilian Lederer, Konrad Seidel, and co-workers in article number 2100086. Furthermore, guidelines on how to influence this behavior by crystallographic texture and adjacent layers, as well as process conditions are identified. Finally, electric-field-induced crystallization is discovered as a new effect in hafnium oxide thin films.

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