Volume 220, Issue 16 2200496
Research Article

Impact of the Channel Thickness on Electron Confinement in MOCVD-Grown High Breakdown Buffer-Free AlGaN/GaN Heterostructures

Ding-Yuan Chen

Corresponding Author

Ding-Yuan Chen

Department of Research and Development, SweGaN AB, Olaus Magnus väg 48A, 583 30 Linköping, Sweden

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Kai-Hsin Wen

Kai-Hsin Wen

Department of Research and Development, SweGaN AB, Olaus Magnus väg 48A, 583 30 Linköping, Sweden

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Mattias Thorsell

Mattias Thorsell

Microwave Electronics Laboratory, Department of Microtechnology and Nanoscience, Chalmers University of Technology, Chalmersplatsen 4, 412 96 Göteborg, Sweden

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Martino Lorenzini

Martino Lorenzini

Department of Research and Development, SweGaN AB, Olaus Magnus väg 48A, 583 30 Linköping, Sweden

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Hans Hjelmgren

Hans Hjelmgren

Microwave Electronics Laboratory, Department of Microtechnology and Nanoscience, Chalmers University of Technology, Chalmersplatsen 4, 412 96 Göteborg, Sweden

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Jr-Tai Chen

Jr-Tai Chen

Department of Research and Development, SweGaN AB, Olaus Magnus väg 48A, 583 30 Linköping, Sweden

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Niklas Rorsman

Niklas Rorsman

Microwave Electronics Laboratory, Department of Microtechnology and Nanoscience, Chalmers University of Technology, Chalmersplatsen 4, 412 96 Göteborg, Sweden

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First published: 29 September 2022
Citations: 4

Abstract

The 2D electron gas (2DEG) confinement on high electron mobility transistor (HEMT) heterostructures with a thin undoped GaN channel layer on the top of a grain-boundary-free AlN nucleation layer is studied. This is the first time demonstration of a buffer-free epi-structure grown with metal–organic chemical vapor deposition with thin GaN channel thicknesses, ranging from 250 to 150 nm, without any degradation of the structural quality and 2DEG properties. The HEMTs with a gate length of 70 nm exhibit good DC characteristics with peak transconductances of 500 mS mm−1 and maximum saturated drain currents above 1 A mm−1. A thinner GaN channel layer improves 2DEG confinement because of the enhanced effectiveness of the AlN nucleation layer acting as a back-barrier. An excellent drain-induced barrier lowering of only 20 mV V−1 at a VDS of 25 V and an outstanding critical electric field of 0.95 MV cm−1 are demonstrated. Good large-signal performance at 28 GHz with output power levels of 2.0 and 3.2 W mm−1 and associated power-added efficiencies of 56% and 40% are obtained at a VDS of 15 and 25 V, respectively. These results demonstrate the potential of sub-100 nm gate length HEMTs on a buffer-free GaN-on-SiC heterostructure.

Conflict of Interest

The authors declare no conflict of interest.

Data Availability Statement

The data that support the findings of this study are available from the corresponding author upon reasonable request.

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