MOVPE growth and optical characterization of GaAsN films with higher nitrogen concentrations

We have successfully grown high-N-content GaAsN films up to 5.1% on GaAs(001) substrates using tertiarybutylarsine (TBAs) as the As precursor by metalorganic vapour phase epitaxy (MOVPE). The narrow X-ray diffraction (XRD) peaks and clear Pendellosung fringes indicate that the GaAsN/GaAs interface is fairly flat and the GaAsN layers are uniform. By the photoluminescence (PL) measurement at 10 K, the clear PL peaks related to the near-band-edge transition could be detected and the bandgap energy was red-shifted to 1.16 eV in 1.9%-N GaAsN film. But, in higher N-content films no peak could be detected. So, post growth annealing in the reactor was applied to 4.7% and 5.1%-N films, and resulted in an enhancement of the PL peak intensity, and the bandgap energy of 5.1%-N film was consequently determined to be 0.95 eV at room temperature. (© 2006 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)