Structural and Optical Properties of Silicon Carbonitride Thin Films Deposited by Reactive DC Magnetron Sputtering

Okan Agirseven,

Okan Agirseven

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Istanbul Technical University, Metallurgical and Materials Engineering Department, 34469, Maslak, Istanbul, Turkey

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Tolga Tavsanoglu,

Tolga Tavsanoglu

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Istanbul Technical University, Metallurgical and Materials Engineering Department, 34469, Maslak, Istanbul, Turkey

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Esra Ozkan Zayim,

Esra Ozkan Zayim

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Istanbul Technical University, Faculty of Science and Letters, Engineering Physics, Department, 34469, Maslak, Istanbul, Turkey

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Onuralp YUCEL,

Onuralp YUCEL

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Istanbul Technical University, Metallurgical and Materials Engineering Department, 34469, Maslak, Istanbul, Turkey

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Okan Agirseven,

Okan Agirseven

[email protected]

Istanbul Technical University, Metallurgical and Materials Engineering Department, 34469, Maslak, Istanbul, Turkey

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Tolga Tavsanoglu,

Tolga Tavsanoglu

[email protected]

Istanbul Technical University, Metallurgical and Materials Engineering Department, 34469, Maslak, Istanbul, Turkey

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Esra Ozkan Zayim,

Esra Ozkan Zayim

[email protected]

Istanbul Technical University, Faculty of Science and Letters, Engineering Physics, Department, 34469, Maslak, Istanbul, Turkey

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Onuralp YUCEL,

Onuralp YUCEL

[email protected]

Istanbul Technical University, Metallurgical and Materials Engineering Department, 34469, Maslak, Istanbul, Turkey

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Book Editor(s): TMS,

TMS

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First published: 17 March 2012

https://doi.org/10.1002/9781118356074.ch76

Summary

This chapter contains sections titled:

Introduction
Experimental
Results and Discussion
Conclusions
Acknowledgments

References

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Supplemental Proceedings: Materials Processing and Interfaces, Volume 1