Research on metallic contamination control of PFA injection molded fittings
Xuemei Li
The State Key Laboratory of Fluid Power and Mechatronic Systems, College of Mechanical Engineering, Zhejiang University, Hangzhou, China
The Key Laboratory of 3D Printing Process and Equipment of Zhejiang Province, College of Mechanical Engineering, Zhejiang University, Hangzhou, China
Contribution: Conceptualization (lead), Data curation (lead), Formal analysis (lead), Methodology (lead), Writing - original draft (lead)
Search for more papers by this authorFan Liu
The State Key Laboratory of Fluid Power and Mechatronic Systems, College of Mechanical Engineering, Zhejiang University, Hangzhou, China
Contribution: Investigation (lead), Resources (lead), Writing - review & editing (supporting)
Search for more papers by this authorCorresponding Author
Jun Xie
The State Key Laboratory of Fluid Power and Mechatronic Systems, College of Mechanical Engineering, Zhejiang University, Hangzhou, China
The Key Laboratory of 3D Printing Process and Equipment of Zhejiang Province, College of Mechanical Engineering, Zhejiang University, Hangzhou, China
Correspondence
Jun Xie and Peng Zhao, The State Key Laboratory of Fluid Power and Mechatronic Systems, College of Mechanical Engineering, Zhejiang University, Hangzhou 310027, China.
Email: [email protected] and [email protected]
Contribution: Funding acquisition (equal), Supervision (lead), Writing - review & editing (lead)
Search for more papers by this authorChengqian Zhang
The State Key Laboratory of Fluid Power and Mechatronic Systems, College of Mechanical Engineering, Zhejiang University, Hangzhou, China
The Key Laboratory of 3D Printing Process and Equipment of Zhejiang Province, College of Mechanical Engineering, Zhejiang University, Hangzhou, China
Contribution: Formal analysis (equal), Supervision (equal)
Search for more papers by this authorRuoxiang Gao
The State Key Laboratory of Fluid Power and Mechatronic Systems, College of Mechanical Engineering, Zhejiang University, Hangzhou, China
The Key Laboratory of 3D Printing Process and Equipment of Zhejiang Province, College of Mechanical Engineering, Zhejiang University, Hangzhou, China
Contribution: Data curation (supporting), Writing - original draft (supporting)
Search for more papers by this authorChenxin Lyu
The State Key Laboratory of Fluid Power and Mechatronic Systems, College of Mechanical Engineering, Zhejiang University, Hangzhou, China
The Key Laboratory of 3D Printing Process and Equipment of Zhejiang Province, College of Mechanical Engineering, Zhejiang University, Hangzhou, China
Contribution: Writing - review & editing (equal)
Search for more papers by this authorCorresponding Author
Peng Zhao
The State Key Laboratory of Fluid Power and Mechatronic Systems, College of Mechanical Engineering, Zhejiang University, Hangzhou, China
The Key Laboratory of 3D Printing Process and Equipment of Zhejiang Province, College of Mechanical Engineering, Zhejiang University, Hangzhou, China
Correspondence
Jun Xie and Peng Zhao, The State Key Laboratory of Fluid Power and Mechatronic Systems, College of Mechanical Engineering, Zhejiang University, Hangzhou 310027, China.
Email: [email protected] and [email protected]
Contribution: Funding acquisition (lead), Resources (lead), Formal analysis (equal), Supervision (equal), Methodology (equal)
Search for more papers by this authorXuemei Li
The State Key Laboratory of Fluid Power and Mechatronic Systems, College of Mechanical Engineering, Zhejiang University, Hangzhou, China
The Key Laboratory of 3D Printing Process and Equipment of Zhejiang Province, College of Mechanical Engineering, Zhejiang University, Hangzhou, China
Contribution: Conceptualization (lead), Data curation (lead), Formal analysis (lead), Methodology (lead), Writing - original draft (lead)
Search for more papers by this authorFan Liu
The State Key Laboratory of Fluid Power and Mechatronic Systems, College of Mechanical Engineering, Zhejiang University, Hangzhou, China
Contribution: Investigation (lead), Resources (lead), Writing - review & editing (supporting)
Search for more papers by this authorCorresponding Author
Jun Xie
The State Key Laboratory of Fluid Power and Mechatronic Systems, College of Mechanical Engineering, Zhejiang University, Hangzhou, China
The Key Laboratory of 3D Printing Process and Equipment of Zhejiang Province, College of Mechanical Engineering, Zhejiang University, Hangzhou, China
Correspondence
Jun Xie and Peng Zhao, The State Key Laboratory of Fluid Power and Mechatronic Systems, College of Mechanical Engineering, Zhejiang University, Hangzhou 310027, China.
Email: [email protected] and [email protected]
Contribution: Funding acquisition (equal), Supervision (lead), Writing - review & editing (lead)
Search for more papers by this authorChengqian Zhang
The State Key Laboratory of Fluid Power and Mechatronic Systems, College of Mechanical Engineering, Zhejiang University, Hangzhou, China
The Key Laboratory of 3D Printing Process and Equipment of Zhejiang Province, College of Mechanical Engineering, Zhejiang University, Hangzhou, China
Contribution: Formal analysis (equal), Supervision (equal)
Search for more papers by this authorRuoxiang Gao
The State Key Laboratory of Fluid Power and Mechatronic Systems, College of Mechanical Engineering, Zhejiang University, Hangzhou, China
The Key Laboratory of 3D Printing Process and Equipment of Zhejiang Province, College of Mechanical Engineering, Zhejiang University, Hangzhou, China
Contribution: Data curation (supporting), Writing - original draft (supporting)
Search for more papers by this authorChenxin Lyu
The State Key Laboratory of Fluid Power and Mechatronic Systems, College of Mechanical Engineering, Zhejiang University, Hangzhou, China
The Key Laboratory of 3D Printing Process and Equipment of Zhejiang Province, College of Mechanical Engineering, Zhejiang University, Hangzhou, China
Contribution: Writing - review & editing (equal)
Search for more papers by this authorCorresponding Author
Peng Zhao
The State Key Laboratory of Fluid Power and Mechatronic Systems, College of Mechanical Engineering, Zhejiang University, Hangzhou, China
The Key Laboratory of 3D Printing Process and Equipment of Zhejiang Province, College of Mechanical Engineering, Zhejiang University, Hangzhou, China
Correspondence
Jun Xie and Peng Zhao, The State Key Laboratory of Fluid Power and Mechatronic Systems, College of Mechanical Engineering, Zhejiang University, Hangzhou 310027, China.
Email: [email protected] and [email protected]
Contribution: Funding acquisition (lead), Resources (lead), Formal analysis (equal), Supervision (equal), Methodology (equal)
Search for more papers by this authorAbstract
In chip manufacturing, ultraclean environment is essential during wet processes such as etching, cleaning, and other stages. The fittings used in the process require corrosion resistance, which are made of perfluoroalkoxy alkanes (PFA) by injection molding. Metallic contamination is one of the major impurities for ultraclean products. This study devotes to decreasing the metallic impurities of the parts and improving the wet processes environment. First, the preliminary experiment explored impurities distribution of the injection molds. By comparing the metallic contamination of the different molds' parts, it is shown that the impurities are evenly distributed. Subsequently, the influence of process parameters, including melt temperature, injection rate, screw speed, and holding pressure, on metallic contamination was investigated through the orthogonal experiment. The results indicate that the injection rate has the greatest impact on metallic contamination, followed by melt temperature. With process optimization, the smallest metallic contamination of 1.077 μg/m2 for pipe joints made of PFA can be achieved, which decreases by 56.3% compared with former results. This research indicates that adjusting parameters is a feasible and effective method to reduce the contamination during injection molding of ultraclean products, which provides another idea for improving the cleanliness of the environment in chip manufacturing.
CONFLICT OF INTEREST
The authors declare that they have no known competing financial interests or personal relationships that could have appeared to influence the work reported in this paper.
Open Research
DATA AVAILABILITY STATEMENT
The data that support the findings of this study are available from the corresponding author upon reasonable request.
REFERENCES
- 1M. Johnson, A. Gildor. Proc. 2011 37th IEEE Photovolt. Special. Conf., F, IEEE 2011.
- 2M. Schuster, S. Ringmann, R. Gärtner, X. Lin, J. Dahmen, Fresenius' J. Anal. Chem. 1997, 357, 258.
- 3B. H. J. Tseng, M. You, S. Hsin, IEEE Trans. Device Mater. Reliab. 2005, 5, 623.
- 4S. Kim, C. Yoon, S. Ham, J. Park, O. Kwon, D. Park, S. Choi, S. Kim, K. Ha, W. Kim, Int. J. Occup. Environ. Health 2018, 24, 109.
- 5M. K. Balazs. Proc. AIP Conf. Proc., F, American Institute of Physics 1998.
- 6H. Fontaine, M. Veillerot. Proc. Solid State Phenom., F, Trans Tech Publ. 2008.
- 7T. Buonassisi, A. A. Istratov, M. D. Pickett, M. Heuer, J. P. Kalejs, G. Hahn, M. A. Marcus, B. Lai, Z. Cai, S. M. Heald, T. F. Ciszek, R. F. Clark, D. W. Cunningham, A. M. Gabor, R. Jonczyk, S. Narayanan, E. Sauar, E. R. Weber, Progr. Photovolt.: Res. Appl. 2006, 14, 513.
- 8S. W. Lim, F. Machuca, H. Liao, R. P. Chiarello, R. C. Helms, J. Electrochem. Soc. 2000, 147, 1136.
- 9B. Pathangey, L. D. Mccarthy, D. C. Skilbred, IEEE Trans. Device Mater. Reliab. 2005, 5, 631.
- 10A. Slaoui, P. Siffert, Silicon: Evolution and Future of a Technology, Springer, London, UK 2004, p. 49.
10.1007/978-3-662-09897-4_4 Google Scholar
- 11C. W. Extrand, L. Monson, J. Appl. Polym. Sci. 2006, 100, 2122.
- 12S. V. Gangal, Encyclopedia of Chemical Technology, Interscience Publishers, Geneva 2000.
- 13T. Ashino, N. Ohtsu, K. Wagatsuma, Mater. Trans. 2008, 49, 1342.
- 14D. Hellin, S. De Gendt, N. Valckx, et al., Spectrochim. Acta, Part B 2006, 61, 496.
- 15S. D. Metal. Proc. ECS Meet. Abstracts, F, IOP Publishing 2006.
- 16M. W. Johnson. Understanding metallic and ionic contamination in photovoltaic wet chemistries from chemical delivery systems; proceedings of the 2010 35th IEEE Photovoltaic Specialists Conference, F, IEEE 2010.
- 17R. P. Donovan, Contamination-Free Manufacturing for Semiconductors and Other Precision Products, CRC Press, Boca Raton, Florida 2001.
- 18C. Osburn, H. Berger, R. Donovan, G. Jones, J Environ Sci 1988, 31, 45.
- 19M. Kozicki, S. Hoenig, P. Robinson, Personnel and Contamination, Springer, Dordrecht 1991, p. 211.
- 20B. Brandt, E. M. Cory, Cloth. Text. Res. J. 1989, 7, 27.
10.1177/0887302X8900700404 Google Scholar
- 21M. Komagata. Proc. 1995 Japan Int. Electron. Manuf. Technol. Symp., F, IEEE 1995.
- 22P. Chalermkarnnon, A. Manonukul, N. Muenya, H. Nakayama, M. Fujiwara, J. Manuf. Sci. Eng. 2011, 133, 054502.
- 23E. Cellucci, G. Michalchuk, Ultrapure Water 2012, 1, 1.
- 24J. J. Schauer, G. C. Lough, M. M. Shafer, et al., Res. Rep. (Health Eff. Inst.) 2006, 133, 1 discussion 7.
- 25D. S. Kharytonau, M. Zimowska, J. Gurgul, G. Mordarski, R. Powalisz, A. Rutowski, G. Putynkowski, A. Zięba, Ł. Mokrzycki, R. P. Socha, Eng. Failure Anal. 2022, 135, 106118.
- 26W.-C. Chen, M.-H. Nguyen, W.-H. Chiu, et al., Int. J. Adv. Manuf. Technol. 2015, 83, 1873.
- 27H.-Y. Mi, X. Jing, J. Peng, L. S. Turng, X. F. Peng, J. Cell. Plast. 2013, 49, 439.
- 28Y. Zou, W. Wu, X. Zhou, G. Wei, B. Jiang, Mater. Des. 2021, 204, 109680.
- 29Z. Ge, Z. Gao, R. Sun, L. Zheng, Constr. Build. Mater. 2012, 31, 289.
- 30W. Cui, X. Li, S. Zhou, J. Weng, J. Appl. Polym. Sci. 2007, 103, 3105.
- 31S. Apichartpattanasiri, J. Hay, S. Kukureka, Wear 2001, 251, 1557.
- 32E. E. Rosenbaum, S. G. Hatzikiriakos, AIChE J. 1997, 43, 598.
- 33S. G. Hatzikiriakos, Prog. Polym. Sci. 2012, 37, 624.
- 34F. Brochard, P. De Gennes, Langmuir 1992, 8, 3033.
- 35L. Léger, H. Hervet, L. Bureau, C. R. Chim. 2006, 9, 80.
- 36L. Leger, J. Phys.: Condens. Matter 2002, 15, S19.
10.1088/0953-8984/15/1/303 Google Scholar
- 37S. Hatzikiriakos. Proc. Intern Polym. Proc., F. 1993.
- 38H. Lau, W. Schowalter, J. Rheol. 1986, 30, 193.
- 39C. W. Stewart, J. Rheol. 1993, 37, 499.
- 40I. B. Kazatchkov, S. G. Hatzikiriakos, Rheol. Acta 2010, 49, 267.
- 41S. G. Hatzikiriakos, J. M. Dealy, J. Rheol. 1992, 36, 703.
- 42S. E. Quiñones-Cisneros, C. K. Zéberg-Mikkelsen, E. H. Stenby, Fluid Phase Equilib. 2001, 178, 1.
- 43M. S. Huang, K. C. Ke, C. Y. Liu, J. Appl. Polym. Sci. 2021, 138, 50357.
- 44V. Gorodokin, D. Zemlyanov. Proc. 2004 23rd IEEE Conv. Electr. Electron. Eng. Israel, F, IEEE 2004.
