Thin Films
First published: 31 January 2014
Abstract
The article contains sections titled:
1. | Preparation of Thin Films |
1.1. | Chemical Vapor Deposition Processes |
1.2. | Plasma Polymerization |
1.3. | Physical Vapor Deposition (PVD) Processes |
1.3.1. | Sputter Deposition |
1.3.2. | Evaporation Deposition |
1.3.3. | Deposition of Metals, Alloys, and Compounds |
1.4. | Thin Film Growth by Molecular Beam Epitaxy (MBE) |
1.4.1. | Introduction |
1.4.2. | The Configuration of MBE Growth Systems |
1.4.3. | Monitoring Facilities |
1.5. | Thin Films by Adsorption Processes |
1.5.1. | Self-Assembled Monolayers |
1.5.2. | Self-Assembled Multilayers |
1.6. | Langmuir–Blodgett and Related Techniques |
1.6.1. | Low Molecular Mass Substances |
1.6.2. | Polymeric Amphiphilic LB Layers |
1.6.3. | Hairy Rod Polymers |
1.7. | Electrochemical Deposition Processes |
1.7.1. | Scope |
1.7.2. | Electrochemical Deposition of Metals and Alloys |
1.7.3. | Electrophoretic Coatings |
1.7.4. | Trends in Electrodeposition |
1.8. | Preparation of Inorganic Mesoporous Films |
2. | Thin Films as Materials |
2.1. | Coatings for Electronic Applications |
2.1.1. | Introduction |
2.1.2. | Hybrid Technology |
2.1.3. | Microsystems |
2.1.4. | Data Storage |
2.1.5. | Microelectronics |
2.1.6. | Semiconducting Films |
2.1.7. | Ferroelectrics |
2.2. | Hard and Decorative Nitride and Carbide Coatings |
2.2.1. | Introduction |
2.2.2. | Growth Techniques |
2.2.3. | Coating Microstructures |
2.2.4. | Adhesion |
2.2.5. | Hard Coatings |
2.3. | Carbon Films |
2.3.1. | Carbon Phases: Composition and Stability |
2.3.2. | Properties and Applications of Diamond Films |
2.3.3. | Properties and Applications of a-C : H, a-C, and ta-C Films |
2.4. | Metallic Films |
2.4.1. | Introduction |
2.4.2. | Electronics Applications |
2.4.3. | Engineering Coatings |
2.4.4. | Dispersed Catalytic Coatings |
2.4.5. | Developments and Trends |
2.5. | Superconductive Coatings |
2.6. | Polymer Films |
2.6.1. | Langmuir–Blodgett Layers of Polymer Films as Materials |
2.6.2. | Films by Plasma Polymerization |
2.7. | Optical Coatings |
2.7.1. | Introduction |
2.7.2. | Theory |
2.7.3. | Deposition Methods |
2.7.4. | Coating Materials |
2.7.5. | Classical Coatings |
2.7.6. | Nonclassical Coatings |
2.7.7. | Applications |
2.8. | Membranes |
2.8.1. | Introduction |
2.8.2. | Fundamentals |
2.8.3. | Membrane Structures and their Preparation |
2.9. | Properties and Applications of Mesoporous Films |