Thin Films
Abstract
The article contains sections titled:
1. |
Preparation of Thin Films |
1.1. |
Chemical Vapor Deposition Processes |
1.2. |
Plasma Polymerization |
1.3. |
Physical Vapor Deposition (PVD) Processes |
1.3.1. |
Sputter Deposition |
1.3.2. |
Evaporation Deposition |
1.3.3. |
Deposition of Metals, Alloys, and Compounds |
1.4. |
Thin Film Growth by Molecular Beam Epitaxy (MBE) |
1.4.1. |
Introduction |
1.4.2. |
The Configuration of MBE Growth Systems |
1.4.3. |
Monitoring Facilities |
1.5. |
Thin Films by Adsorption Processes |
1.5.1. |
Self-Assembled Monolayers |
1.5.2. |
Self-Assembled Multilayers |
1.6. |
Langmuir - Blodgett and Related Techniques |
1.6.1. |
Low Molecular Mass Substances |
1.6.2. |
Polymeric Amphiphilic LB Layers |
1.6.3. |
Hairy Rod Polymers |
1.7. |
Electrochemical Deposition Processes |
1.7.1. |
Scope |
1.7.2. |
Electrochemical Deposition of Metals and Alloys |
1.7.3. |
Electrophoretic Coatings |
1.7.4. |
Trends in Electrodeposition |
2. |
Thin Films as Materials |
2.1. |
Coatings for Electronic Applications |
2.1.1. |
Introduction |
2.1.2. |
Hybrid Technology |
2.1.3. |
Microsystems |
2.1.4. |
Data Storage |
2.1.5. |
Microelectronics |
2.1.6. |
Semiconducting Films |
2.1.7. |
Ferroelectrics |
2.2. |
Hard and Decorative Nitride and Carbide Coatings |
2.2.1. |
Introduction |
2.2.2. |
Growth Techniques |
2.2.3. |
Coating Microstructures |
2.2.4. |
Adhesion |
2.2.5. |
Hard Coatings |
2.3. |
Carbon Films |
2.3.1. |
Carbon Phases: Composition and Stability |
2.3.2. |
Properties and Applications of Diamond Films |
2.3.3. |
Properties and Applications of a-C : H, a-C, and ta-C Films |
2.4. |
Metallic Films |
2.4.1. |
Introduction |
2.4.2. |
Electronics Applications |
2.4.3. |
Engineering Coatings |
2.4.4. |
Dispersed Catalytic Coatings |
2.4.5. |
Developments and Trends |
2.5. |
Superconductive Coatings |
2.6. |
Polymer Films |
2.6.1. |
Langmuir - Blodgett Layers of Polymer Films as Materials |
2.6.2. |
Films by Plasma Polymerization |
2.7. |
Optical Coatings |
2.7.1. |
Introduction |
2.7.2. |
Theory |
2.7.3. |
Deposition Methods |
2.7.4. |
Coating Materials |
2.7.5. |
Classical Coatings |
2.7.6. |
Nonclassical Coatings |
2.7.7. |
Applications |
2.8. |
Membranes |
2.8.1. |
Introduction |
2.8.2. |
Fundamentals |
2.8.3. |
Membrane Structures and their Preparation |