GaAs-based In0.29 Al0.71As/In0.3Ga0.7As high-electron mobility transistors
Abstract
In0.29Al0.71As/In0.3Ga0.7 As heterostructures grown on GaAs substrates with a step-graded metamorphic InxGa1−x As buffer were characterized. Cross-sectional TEM micrographs revealed that an unstrained and dislocation-free In0.3Ga0.7As layer used as a buffer can be obtained. A 0.6-μm-long gate HEMT based on this heterostructure demonstrated a gm of 230 mS/mm, an fT of 23 GHz, and an fmax of 73 GHz. © 1996 John Wiley & Sons, Inc.