Volume 11, Issue 3 pp. 148-150

GaAs-based In0.29 Al0.71As/In0.3Ga0.7As high-electron mobility transistors

Yi-Jen Chan

Corresponding Author

Yi-Jen Chan

Department of Electrical Engineering, National Central University, Chungli, Taiwan 32054, Republic of China

Department of Electrical Engineering, National Central University, Chungli, Taiwan 32054, Republic of ChinaSearch for more papers by this author
Chia-Song Wu

Chia-Song Wu

Department of Electrical Engineering, National Central University, Chungli, Taiwan 32054, Republic of China

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Jen-Inn Chyl

Jen-Inn Chyl

Department of Electrical Engineering, National Central University, Chungli, Taiwan 32054, Republic of China

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Jia-Lin Shieh

Jia-Lin Shieh

Department of Electrical Engineering, National Central University, Chungli, Taiwan 32054, Republic of China

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Abstract

In0.29Al0.71As/In0.3Ga0.7 As heterostructures grown on GaAs substrates with a step-graded metamorphic InxGa1−x As buffer were characterized. Cross-sectional TEM micrographs revealed that an unstrained and dislocation-free In0.3Ga0.7As layer used as a buffer can be obtained. A 0.6-μm-long gate HEMT based on this heterostructure demonstrated a gm of 230 mS/mm, an fT of 23 GHz, and an fmax of 73 GHz. © 1996 John Wiley & Sons, Inc.

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