X-ray mirrors with sub-nanometre figure errors obtained by differential deposition of thin WSi2 films

Journal of Synchrotron Radiation Journal of

Synchrotron Radiation

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Figure 6

Normalized thickness profiles of WSi₂ films coated on stationary substrates through apertures of 2 mm (a) and 24 mm (b).

JOURNAL OF

SYNCHROTRON

RADIATION

ISSN: 1600-5775

Volume 30| Part 4| July 2023| Pages 708-716

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