X-ray mirrors with sub-nanometre figure errors obtained by differential deposition of thin WSi2 films

Bras, P.; Morawe, C.; Labouré, S.; Perrin, F.; Vivo, A.; Barrett, R.

doi:10.1107/S1600577523003697

Journal of Synchrotron Radiation Journal of

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Figure 4

Surface roughness (blue symbols, left ordinate) and stress (red symbols, right ordinate) of 60 nm-thick WSi₂ films versus Ar pressure. Broken lines are guides to the eye.

JOURNAL OF

SYNCHROTRON

RADIATION

ISSN: 1600-5775

Volume 30| Part 4| July 2023| Pages 708-716

https://doi.org/10.1107/S1600577523003697

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