X-ray topography of subsurface crystal layers

Swiatek, Z.; Fodchuk, I.; Zaplitnyy, R.

doi:10.1107/S1600576717007208

Journal of Applied Crystallography Journal of Applied

Crystallography

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Figure 5

Topograms of Cd_1−xHg_xTe/CdTe (111) epitaxial layers, obtained with the skew-asymmetric 115 reflection of Cu $[{K{\alpha_{ 1,2}}}]$ . Region I is not implanted, region II is implanted with dose D₁, and region III is implanted with dose D₁ + D₂. (a) $[{L_{\rm ext}} \simeq 5.82 ]$ µm (φ = 90°); (b) $[{L_{\rm ext}} \simeq 2.61]$ µm (φ = 30°); (c) $[{L_{\rm ext}} \simeq 1.42]$ µm (φ = 20°).

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ISSN: 1600-5767

Volume 50| Part 3| June 2017| Pages 727-733

https://doi.org/10.1107/S1600576717007208

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