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ChemInform Abstract: Patterning of Lithium Niobate Thin Films Derived from Aqueous Solution.
First published: 24 June 2010
Abstract
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ChemInform Abstract
Patterned LiNbO3 thin films, prepared from an aqueous solution derived from a double alkoxide and neutralized by HOAc, can be processed on a sapphire substrate using a photolithography technique. The neutralization step is necessary to avoid dissolution of the Al mask. The transparent, crystalline film obtained by heat treatment at 500 °C has a refractive index comparable to that of a LiNbO3 (001) single crystal.
