ChemInform Abstract: Preparation of A-15 Nb3Ge by Chemical Vapour Deposition.
Abstract
Vapour phase reductions of NbCls and GeCl4 by H; is investigated in the temp. range 600-950°C. The deposition rates of Nb or Ge are given (s.below).
ChemInform Abstract
Vapour phase reductions of NbCls and GeCl4 by H; is investigated in the temp. range 600-950°C. The deposition rates of Nb or Ge are given (s.below). The compositions of deposits from the NbCl5 - GeCl4- H2 system at 800-900°C agree well with those estimated by the reduction rates of the respective chlorides, RNb and RGC.