Recent results on the photoluminescence properties of silicon nanocrystals embedded in silicon oxide are reviewed and discussed. The attention is focused on Si nanocrystals produced by high-temperature annealing of silicon rich oxide layers deposited by plasma-enhanced chemical vapor deposition. The influence of deposition parameters and layer thickness is analyzed in detail. The nanocrystal size can be roughly controlled by means of Si content and annealing temperature and time. Unfortunately, a technique for independently fine tuning the emission efficiency and the size is still lacking; thus, only middle size nanocrystals have high emission efficiency. Interestingly, the layer thickness affects the nucleation and growth kinetics so changing the luminescence efficiency.

References

1 Ossicini S., Pavesi L., and Priolo F., Light Emitting Silicon for Microphotonics, 2003, Springer, New York, NY, USA, Tracts in Modern Physics.
Google Scholar
2 Canham L. T., Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers, Applied Physics Letters. (1990) 57, no. 10, 1046–1048, https://doi.org/10.1063/1.103561.
Web of Science® Google Scholar
3 Pavesi L., Dal Negro L., Mazzoleni C., Franzò G., and Priolo F., Optical gain in silicon nanocrystals, Nature. (2000) 408, no. 6811, 440–444, https://doi.org/10.1038/35044012.
Google Scholar
4 Salib M., Morse M., Liao L. et al., Silicon photonics, Intel Technology Journal. (2004) 8, no. 2.
Google Scholar
5 Reed G. T., Device physics: the optical age of silicon, Nature. (2004) 427, no. 6975, 595–596, https://doi.org/10.1038/427595b.
Google Scholar
6 Michalet X., Pinaud F. F., Bentolila L. A. et al., Quantum dots for live cells, in vivo imaging, and diagnostics, Science. (2005) 307, no. 5709, 538–544, https://doi.org/10.1126/science.1104274.
Web of Science® Google Scholar
7 Fu A., Gu W., Larabell C., and Alivisatos A. P., Semiconductor nanocrystals for biological imaging, Current Opinion in Neurobiology. (2005) 15, no. 5, 568–575, https://doi.org/10.1016/j.conb.2005.08.004.
Google Scholar
8 Li Z. F. and Ruckenstein E., Water-soluble poly(acrylic acid) grafted luminescent silicon nanoparticles and their use as fluorescent biological staining labels, Nano Letters. (2004) 4, no. 8, 1463–1467, https://doi.org/10.1021/nl0492436.
Google Scholar
9 Yu W. W., Chang E., Drezek R., and Colvin V. L., Water-soluble quantum dots for biomedical applications, Biochemical and Biophysical Research Communications. (2006) 348, no. 3, 781–786, https://doi.org/10.1016/j.bbrc.2006.07.160.
Web of Science® Google Scholar
10 Hua F., Erogbogbo F., Swihart M. T., and Ruckenstein E., Organically capped silicon nanoparticles with blue photoluminescence prepared by hydrosilylation followed by oxidation, Langmuir. (2006) 22, no. 9, 4363–4370, https://doi.org/10.1021/la0529106.
Google Scholar
11 Garrido Fernandez B., López M., García C. et al., Influence of average size and interface passivation on the spectral emission of Si nanocrystals embedded in SiO₂, Journal of Applied Physics. (2002) 91, no. 2, 798–807, https://doi.org/10.1063/1.1423768.
Google Scholar
12 Luterova K., Dohnalova K., Trojanek F. et al., Porous silicon grains in SiO₂ matrix: Ultrafast photoluminescence and optical gain, Journal of Non-Crystalline Solids. (2006) 352, no. 28-29, 3041–3046.
Google Scholar
13 Iacona F., Franzò G., and Spinella C., Correlation between luminescence and structural properties of Si nanocrystals, Journal of Applied Physics. (2000) 87, no. 3, 1295–1303, https://doi.org/10.1063/1.372013.
Web of Science® Google Scholar
14 Iacona F., Bongiorno C., Spinella C., Boninelli S., and Priolo F., Formation and evolution of luminescent Si nanoclusters produced by thermal annealing of SiO_x films, Journal of Applied Physics. (2004) 95, no. 7, 3723–3732, https://doi.org/10.1063/1.1664026.
Web of Science® Google Scholar
15 Daldosso N., Das G., Larcheri S. et al., Silicon nanocrystal formation in annealed silicon-rich silicon oxide films prepared by plasma enhanced chemical vapor deposition, Journal of Applied Physics. (2007) 101, no. 11, 7, 113510, https://doi.org/10.1063/1.2740335.
Web of Science® Google Scholar
16 Daldosso N., Das G., Dalba G. et al., Silicon nanocrystal nucleation as a function of the annealing temperature in SiO_x films, Materials Research Society Symposium Proceedings Series. (2003) 770, no. I3.4, 1–6.
Google Scholar
17 Mulloni V., Bellutti P., and Vanzetti L., XPS and SIMS investigation on the role of nitrogen in Si nanocrystals formation, Surface Science. (2005) 585, no. 3, 137–143, https://doi.org/10.1016/j.susc.2005.03.059.
Google Scholar

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