Original Article
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The Prospects of a Subnanometer Focused Neon Ion Beam
F. H. M. Rahman, Shawn McVey, Louis Farkas, John A. Notte,
Shida Tan, Richard H. Livengood,
Corresponding Author
John A. Notte
Carl Zeiss NTS, Peabody, Massachusetts
Carl Zeiss NTS, 1 Corporation Way, Peabody, MA 01960Search for more papers by this authorRichard H. Livengood
Intel Corporation, Santa Clara, California
Search for more papers by this authorF. H. M. Rahman, Shawn McVey, Louis Farkas, John A. Notte,
Shida Tan, Richard H. Livengood,
Corresponding Author
John A. Notte
Carl Zeiss NTS, Peabody, Massachusetts
Carl Zeiss NTS, 1 Corporation Way, Peabody, MA 01960Search for more papers by this authorRichard H. Livengood
Intel Corporation, Santa Clara, California
Search for more papers by this authorSummary
The success of the helium ion microscope has encouraged extensions of this technology to produce beams of other ion species. A review of the various candidate ion beams and their technical prospects suggest that a neon beam might be the most readily achieved. Such a neon beam would provide a sputtering yield that exceeds helium by an order of magnitude while still offering a theoretical probe size less than 1-nm. This article outlines the motivation for a neon gas field ion source, the expected performance through simulations, and provides an update of our experimental progress. SCANNING 33: 129–134, 2012. © 2011 Wiley Periodicals, Inc.
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