Volume 31, Issue 3 pp. 107-113

Research Article

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A method to measure the total scattering cross section and effective beam gas path length in a low-vacuum SEM

J. Rattenberger,

Corresponding Author

J. Rattenberger

[email protected]

Institute for Electron Microscopy, Graz University of Technology, Graz, Austria

Centre for Electron Microscopy Graz, Graz, Austria

Graz University of Technology, Institute for Electron Microscopy and Fine Structure Research, Steyrergasse 17, Graz, Styria 8010 AustriaSearch for more papers by this author

J. Wagner,

J. Wagner

Institute for Electron Microscopy, Graz University of Technology, Graz, Austria

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H. Schröttner,

H. Schröttner

Institute for Electron Microscopy, Graz University of Technology, Graz, Austria

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S. Mitsche,

S. Mitsche

Institute for Electron Microscopy, Graz University of Technology, Graz, Austria

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A. Zankel,

A. Zankel

Institute for Electron Microscopy, Graz University of Technology, Graz, Austria

Centre for Electron Microscopy Graz, Graz, Austria

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J. Rattenberger,

Corresponding Author

J. Rattenberger

[email protected]

Institute for Electron Microscopy, Graz University of Technology, Graz, Austria

Centre for Electron Microscopy Graz, Graz, Austria

Graz University of Technology, Institute for Electron Microscopy and Fine Structure Research, Steyrergasse 17, Graz, Styria 8010 AustriaSearch for more papers by this author

J. Wagner,

J. Wagner

Institute for Electron Microscopy, Graz University of Technology, Graz, Austria

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H. Schröttner,

H. Schröttner

Institute for Electron Microscopy, Graz University of Technology, Graz, Austria

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S. Mitsche,

S. Mitsche

Institute for Electron Microscopy, Graz University of Technology, Graz, Austria

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A. Zankel,

A. Zankel

Institute for Electron Microscopy, Graz University of Technology, Graz, Austria

Centre for Electron Microscopy Graz, Graz, Austria

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First published: 05 June 2009

https://doi.org/10.1002/sca.20148

Citations: 17

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Abstract

A method is presented to determine the total scattering cross section of imaging gases used in low-vacuum scanning electron microscopy or environmental scanning electron microscopy. Experimental results are presented for water vapor, nitrogen gas and ambient air for primary beam electron energies between 5 and 30 keV. The measured results are compared and discussed with calculated values. This method allows the effective beam gas path length (BGPL) to be determined. The variations of the effective BGPL with varying chamber pressure are presented. SCANNING 31: 107–113, 2009. © 2009 Wiley Periodicals, Inc.

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