Original Paper
Lateral structuring of porous silicon: application to waveguides
Abstract
The problem of lateral definition of waveguides and photonic structures has been tackled by means of direct laser scribing on porous silicon (PS). The low thermal conductivity of PS allows for local oxidation and even the complete ablation of the material with laser power of a few mW. The buried Laser Local Oxidized (LaLOx) method exhibits great versatility and efficiency in achieving lateral light confinement in waveguides.
