Ordered macropore formation in silicon

V. V. Starkov,

Corresponding Author

V. V. Starkov

[email protected]

Institute of Microelectronics Technology, Russian Academy of Sciences, 142432 Chernogolovka, Moscow district, Russia

Tel.: +7 095 962 80 74, Fax: +7 095 962 80 47Search for more papers by this author

V. V. Starkov,

Corresponding Author

V. V. Starkov

[email protected]

Institute of Microelectronics Technology, Russian Academy of Sciences, 142432 Chernogolovka, Moscow district, Russia

Tel.: +7 095 962 80 74, Fax: +7 095 962 80 47Search for more papers by this author

First published: 23 April 2003

https://doi.org/10.1002/pssa.200306462

Citations: 9

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Abstract

In the present work the experimental results on controllable formation of ordered macroporous structure in silicon are submitted. Special attention is given to the form of a porous structure during deep anodic etching process.

References

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Volume197, Issue1

May 2003

Pages 22-26

Ordered macropore formation in silicon

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Ordered macropore formation in silicon

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