Section 11
Free Access
Integral analysis of the flow dynamics and mass transfer in a wavy liquid film on a spinning disk
Abstract
In the present work the complex process of diffusion-controlled wet chemical etching of a rotating silicon wafer is analyzed in the framework of an unsteady integral boundary layer approximation. The obtained results reproduce the waviness and the associated enhancement of the mass transfer in the wavy region, and are in good agreement with experimental findings. (© 2012 Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim)
