Measurements of signal transmission to 20 GHz and crosstalk to 10 GHz on small copper microstrips embedded in polyimide dielectric

Multi-GHz measurements of signal propagation and crosstalk are reported for small, somewhat resistive, copper microstrips (20-30 μm width and 2-3 μm thickness) that are embedded in polyimide dielectric and fabricated on a silicon substrate. The transmission, reflection, signal velocity, and crosstalk on 50-Ω terminated microstrips are well behaved and, moreover, are well described by standard transmission line theory when resistive losses (corrected for the skin effect) are included.