High-precision dielectric sensor system based on balanced CSRR-SIW resonators
Hao Jiang
Engineering Research Center of Smart Microsensors and Microsystems, Hangzhou Dianzi University, Hangzhou, China
Search for more papers by this authorXiaokang Qi
Laboratory of Applied Research on Electromagnetics, Zhejiang University, Hangzhou, China
Search for more papers by this authorQuan Wang
Engineering Research Center of Smart Microsensors and Microsystems, Hangzhou Dianzi University, Hangzhou, China
Search for more papers by this authorCorresponding Author
Kuiwen Xu
Engineering Research Center of Smart Microsensors and Microsystems, Hangzhou Dianzi University, Hangzhou, China
School of Mechatronic Engineering, China University of Mining and Technology, Xuzhou, Jiangsu, China
Correspondence
Kuiwen Xu, Engineering Research Center of Smart Microsensors and Microsystems, Hangzhou Dianzi University, Hangzhou 310018, China.
Email: [email protected]
Search for more papers by this authorShichang Chen
Engineering Research Center of Smart Microsensors and Microsystems, Hangzhou Dianzi University, Hangzhou, China
Search for more papers by this authorLiang Wu
Engineering Research Center of Smart Microsensors and Microsystems, Hangzhou Dianzi University, Hangzhou, China
Search for more papers by this authorFang Zhu
Engineering Research Center of Smart Microsensors and Microsystems, Hangzhou Dianzi University, Hangzhou, China
Search for more papers by this authorWen-Sheng Zhao
Engineering Research Center of Smart Microsensors and Microsystems, Hangzhou Dianzi University, Hangzhou, China
Search for more papers by this authorLinxi Dong
Engineering Research Center of Smart Microsensors and Microsystems, Hangzhou Dianzi University, Hangzhou, China
Search for more papers by this authorLixin Ran
Laboratory of Applied Research on Electromagnetics, Zhejiang University, Hangzhou, China
Search for more papers by this authorGaofeng Wang
Engineering Research Center of Smart Microsensors and Microsystems, Hangzhou Dianzi University, Hangzhou, China
Search for more papers by this authorHao Jiang
Engineering Research Center of Smart Microsensors and Microsystems, Hangzhou Dianzi University, Hangzhou, China
Search for more papers by this authorXiaokang Qi
Laboratory of Applied Research on Electromagnetics, Zhejiang University, Hangzhou, China
Search for more papers by this authorQuan Wang
Engineering Research Center of Smart Microsensors and Microsystems, Hangzhou Dianzi University, Hangzhou, China
Search for more papers by this authorCorresponding Author
Kuiwen Xu
Engineering Research Center of Smart Microsensors and Microsystems, Hangzhou Dianzi University, Hangzhou, China
School of Mechatronic Engineering, China University of Mining and Technology, Xuzhou, Jiangsu, China
Correspondence
Kuiwen Xu, Engineering Research Center of Smart Microsensors and Microsystems, Hangzhou Dianzi University, Hangzhou 310018, China.
Email: [email protected]
Search for more papers by this authorShichang Chen
Engineering Research Center of Smart Microsensors and Microsystems, Hangzhou Dianzi University, Hangzhou, China
Search for more papers by this authorLiang Wu
Engineering Research Center of Smart Microsensors and Microsystems, Hangzhou Dianzi University, Hangzhou, China
Search for more papers by this authorFang Zhu
Engineering Research Center of Smart Microsensors and Microsystems, Hangzhou Dianzi University, Hangzhou, China
Search for more papers by this authorWen-Sheng Zhao
Engineering Research Center of Smart Microsensors and Microsystems, Hangzhou Dianzi University, Hangzhou, China
Search for more papers by this authorLinxi Dong
Engineering Research Center of Smart Microsensors and Microsystems, Hangzhou Dianzi University, Hangzhou, China
Search for more papers by this authorLixin Ran
Laboratory of Applied Research on Electromagnetics, Zhejiang University, Hangzhou, China
Search for more papers by this authorGaofeng Wang
Engineering Research Center of Smart Microsensors and Microsystems, Hangzhou Dianzi University, Hangzhou, China
Search for more papers by this authorHao Jiang, Xiaokang Qi, and Quan Wang contributed equally to this work.
Funding information: China Postdoctoral Science Foundation under Grant 2019M661984; National Natural Science Foundation of China under Grant No. 61971174; Research Project of Education of Zhejiang Province under Grant Y201942286; Talent Project of Zhejiang Association for Science and Technology under Grant SKX201901; Zhejiang Provincial Natural Science Foundation of China under Grant No. LY19F010012
Abstract
A high-precision differential microwave dielectric sensor system based on a pair of CSRR-SIW resonators is introduced. The proposed method consists of four parts: the frequency-sweeping signal source, the balanced sensor based on CSRR-SIW, the RMS power detector, and the data acquisition system. Without a vector network analyzer (VNA) and other instruments, the electromagnetic properties of materials can be measured conveniently with the proposed method. In this work, two CSRR resonators inside SIW cavities are used as the balanced RF sensing components, one for measurement and the other for reference. In virtue of the electric field concentration effect of the CSRR and the high Q factor of SIW cavity, the proposed sensor achieves high sensitivity to material under test (MUT), with high isolation between the balanced resonators and strong capability of suppressing the electromagnetic interferences from the external environment. The resonating frequency of the balanced microwave resonator under no-load condition is 1.587 GHz. With balanced sensor configuration, interferences from the external environment and fabrication errors for the single-resonator-based system can be filtered out and compensated automatically, and thus high precision of the dielectric constant measurement can be achieved. The experiment results of proposed differential dielectric sensor system validate that the measurement accuracy of the dielectric constant can reach an excellent level with a relative measurement error below 0.1%.
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