Detached Vertical (Al,Ga)N Nanowires to Realize the Flexible Ultraviolet Photodetector with High Ultraviolet/Visible Reject Ratio and Detectivity
Min Zhou
Key Lab of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS), Suzhou, 215123 China
School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei, 230026 China
Search for more papers by this authorCorresponding Author
Yukun Zhao
Key Lab of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS), Suzhou, 215123 China
Nanchang Research Institute, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS), Nanchang, 330200 China
Search for more papers by this authorWenxian Yang
Key Lab of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS), Suzhou, 215123 China
Search for more papers by this authorJianya Zhang
Key Lab of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS), Suzhou, 215123 China
School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei, 230026 China
Search for more papers by this authorMin Jiang
Key Lab of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS), Suzhou, 215123 China
School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei, 230026 China
Search for more papers by this authorYuanyuan Wu
Key Lab of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS), Suzhou, 215123 China
Search for more papers by this authorZiwei Xu
Key Lab of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS), Suzhou, 215123 China
Search for more papers by this authorCorresponding Author
Shulong Lu
Key Lab of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS), Suzhou, 215123 China
School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei, 230026 China
Search for more papers by this authorMin Zhou
Key Lab of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS), Suzhou, 215123 China
School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei, 230026 China
Search for more papers by this authorCorresponding Author
Yukun Zhao
Key Lab of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS), Suzhou, 215123 China
Nanchang Research Institute, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS), Nanchang, 330200 China
Search for more papers by this authorWenxian Yang
Key Lab of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS), Suzhou, 215123 China
Search for more papers by this authorJianya Zhang
Key Lab of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS), Suzhou, 215123 China
School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei, 230026 China
Search for more papers by this authorMin Jiang
Key Lab of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS), Suzhou, 215123 China
School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei, 230026 China
Search for more papers by this authorYuanyuan Wu
Key Lab of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS), Suzhou, 215123 China
Search for more papers by this authorZiwei Xu
Key Lab of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS), Suzhou, 215123 China
Search for more papers by this authorCorresponding Author
Shulong Lu
Key Lab of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS), Suzhou, 215123 China
School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei, 230026 China
Search for more papers by this authorAbstract
Flexible ultraviolet (UV) photodetectors (PDs) can meet the growing demands and wide applications of next-generation portable and lightweight optoelectronic devices. Herein, a flexible UV PD based on (Al,Ga)N nanowires (NWs) is proposed and successfully fabricated by numerical and experimental approaches, which have high UV/visible reject ratio (1.5 × 104) and detectivity (8 × 1010 Jones). To accelerate the carrier transport and enhance the response, the top–down–top current pathway is demonstrated by introducing interdigitated electrodes and graphene. The UV/visible reject ratio of the flexible PD can be enhanced over 40 times by removing epitaxial silicon substrate to eliminate the corresponding visible response, leading to an excellent detection selectivity. By numerical simulations, the electric field intensities of the NWs are comparative in the unbending and bending states. After −120° bending, the PD performance remains quite stable. Under different bending states, the maximum variation of different response time can be kept within 0.15 s. According to the experimental data, the barrier height is essentially unchanged under different bending states, which should be a key factor contributing to the outstanding stability of the PD.
Conflict of Interest
The authors declare no conflict of interest.
Open Research
Data Availability Statement
The data that support the findings of this study are available from the corresponding author upon reasonable request.
Supporting Information
Filename | Description |
---|---|
ente202200885-sup-0001-SuppData-S1.pdf702.1 KB | Supplementary Material |
Please note: The publisher is not responsible for the content or functionality of any supporting information supplied by the authors. Any queries (other than missing content) should be directed to the corresponding author for the article.
References
- 1 L. Z. Qiu, S. Y. Wei, H. S. Xu, Z. X. Zhang, Z. Y. Guo, X. G. Chen, S. Y. Liu, D. Wu, L. B. Luo. Nano Lett. 2020, 20, 644.
- 2 W. Song, D. Yang, Y. Qiu, Q. Wang, B. Wu, Y. Zong, Q. Feng. Micro Nano Lett. 2019, 14, 215.
- 3 M. Zhou, Y. K. Zhao, L. F. Bian, J. Y. Zhang, W. X. Yang, Y. Y. Wu, Z. W. Xing, M. Jiang, S. L. Lu. Chin. Phys. B 2021, 30, 078506.
- 4 S. Praveen, S. Veeralingam, S. Badhulika. Adv. Mater. Interfaces 2021, 8, 2100373.
- 5 Y. Liu, H. Zhu, A. Watanabe, S. Yamamoto, T. Miyashita, M. Mitsuishi. J. Appl. Polym. Sci. 2021, 138, 50947.
- 6 J. Yao, G. Yang. Small 2018, 14, 1704524.
- 7 Q. L. Hua, J. L. Sun, H. T. Liu, X. Cui, K. Y. Ji, W. B. Guo, C. F. Pan, W. G. Hu, Z. L. Wang. Nano Energy 2020, 78, 105312.
- 8 H. Mescher, F. Schackmar, H. Eggers, T. Abzieher, M. Zuber, E. Hamann, T. Baumbach, B. S. Richards, G. Hernandez-Sosa, U. W. Paetzold, U. Lemmer. ACS Appl. Mater. Interfaces 2020, 12, 15774.
- 9 H. Xu, L. Hao, H. Liu, S. Dong, Y. Wu, Y. Liu, B. Cao, Z. Wang, C. Ling, S. Li, Z. Xu, Q. Xue, K. Yan. ACS Appl. Mater. Interfaces 2020, 12, 35250.
- 10 S. Zhang, T. Zhang, Z. Liu, J. Wang, L. Yu, J. Xu, K. Chen, P. R. I. Cabarrocas. Nano Energy 2021, 86, 106121.
- 11 D. Wang, P. Shi, R. F. Xing, Z. F. Wu, L. Wei, Y. X. Chen, H. X. Ren, C. F. Yu, F. J. Li. Mater. Des. 2021, 203, 109616.
- 12 S. Veeralingam, P. Yadav, S. Badhulika. Nanoscale 2020, 12, 9152.
- 13 C. S. Yin, J. H. Wu, J. Zhou, D. H. Zhang, Z. J. Liu, X. D. Liu, L. Z. Liu, Z. J. Zhan, S. Garner, Y. Q. Fu. Sens. Actuators, A 2021, 321, 112590.
- 14 S. Han, I. Choi, C. R. Lee, K. U. Jeong, S. K. Lee, J. S. Kim. ACS Appl. Maters. Interfaces 2020, 12, 970.
- 15 T. Wang, H. L. Liang, Z. Y. Han, Y. X. Sui, Z. X. Mei. Adv. Mater. Technol. 2021, 6, 2000945.
- 16 C. C. Shan, M. Zhao, D. Y. Jiang, J. M. Sun, Y. H. Duan, Q. Li, M. Li, X. Zhou, N. Wang, X. M. Fei, X. J. Zhao. J. Mater. Sci.-Mater. Electron. 2019, 30, 15198.
- 17 Y. Duan, M. Cong, D. Jiang, W. Zhang, X. Yang, C. Shan, X. Zhou, M. li, Q. Li. Adv. Mater. Interfaces 2019, 6, 1900470.
- 18 H. Li, D. D. Yang, T. Zhang, P. Zhang, F. Wang, C. J. Qin, R. H. Yang, Z. D. Chen, S. B. Li. J. Mater. Sci. 2019, 54, 11556.
- 19 H. X. Li, J. Huang, Q. H. Zheng, Y. L. Zheng. Vacuum 2020, 172, 109089.
- 20 Z. Li, Y. Xu, J. Zhang, Y. Cheng, D. Chen, Q. Feng, S. Xu, Y. Zhang, J. Zhang, Y. Hao, C. Zhang. IEEE Photonics J. 2019, 11, 6803709.
- 21 S. H. Lee, S. B. Kim, Y. J. Moon, S. M. Kim, H. J. Jung, M. S. Seo, K. M. Lee, S. K. Kim, S. W. Lee. ACS Photonics 2017, 4, 2937.
- 22 Y. Y. Zhang, Y. X. Zheng, J. Y. Lai, J. H. Seo, K. H. Lee, C. S. Tan, S. An, S. H. Shin, B. Son, M. Kim. ACS Nano 2021, 15, 8386.
- 23 S. Zhang, X. R. Zhang, F. Ren, Y. Yin, T. Feng, W. R. Song, G. D. Wang, M. Liang, J. L. Xu, J. W. Wang, J. X. Wang, J. M. Li, X. Y. Yi, Z. Q. Liu. J. Appl. Phys. 2020, 128, 155705.
- 24 L. Y. Zhang, X. Q. Xiu, Y. W. Li, Y. X. Zhu, X. M. Hua, Z. L. Xie, T. Tao, B. Liu, P. Chen, R. Zhang, Y. D. Zheng. Nanophotonics 2020, 9, 4497.
- 25 Y. K. Zhao, Z. W. Xing, L. Geelhaar, J. Y. Zhang, W. X. Yang, T. Auzelle, Y. Y. Wu, L. F. Bian, S. L. Lu. ACS Appl. Nano Mater. 2020, 3, 9943.
- 26 I. M. Asuo, P. Fourmont, I. Ka, D. Gedamu, S. Bouzidi, A. Pignolet, R. Nechache, S. G. Cloutier. Small 2019, 15, 1804150.
- 27 Z. D. Huang, W. Y. Weng, S. J. Chang, C. J. Chiu, T. J. Hsueh, S. L. Wu. IEEE Sens. J. 2013, 13, 3462.
- 28 J. Zhang, Z. Xing, D. Wu, L. Bian, Y. Zhao, W. Yang, Y. Wu, M. Zhou, M. Jiang, S. Lu. J. Cryst. Growth 2021, 562, 126066.
- 29 N. A. Preschilla, N. M. Elkashef, R. S. Srinivasa, S. Major. Surf. Coat. Technol. 1998, 108, 328.
- 30 P. M. Lundquist, W. P. Lin, Z. Y. Xu, G. K. Wong, E. D. Rippert, J. A. Helfrich, J. B. Ketterson. Appl. Phys. Lett. 1994, 65, 1085.
- 31 D. Wang, W. Wu, S. Fang, Y. Kang, X. Wang, W. Hu, H. Yu, H. Zhang, X. Liu, Y. Luo, J.-H. He, L. Fu, S. Long, S. Liu, H. Sun. Light Sci. Appl. 2022, 11, 227.
- 32 D. Wang, X. Liu, Y. Kang, X. Wang, Y. Wu, S. Fang, H. Yu, M. H. Memon, H. Zhang, W. Hu, Z. Mi, L. Fu, H. Sun, S. Long. Nat. Electron. 2021, 4, 645.
- 33 W. Zhu, J. Si, L. Zhang, T. Li, W. Song, Y. Zhou, J. Yu, R. Chen, Y. Feng, L. Wang. Semicond. Sci. Technol. 2020, 35, 125025.
- 34 Y. L. Zheng, Y. Li, X. Tang, W. L. Wang, G. Q. Li. Adv. Opt. Mater. 2020, 8, 2000197.
- 35 Y. X. Zhu, K. W. Liu, Q. Ai, Q. C. Hou, X. Chen, Z. Z. Zhang, X. H. Xie, B. H. Li, D. Z. Shen. J. Mater. Chem. C 2020, 8, 2719.
- 36 J. H. Gao, Y. H. Li, Y. X. Hu, Z. T. Wang, A. Q. Hu, X. Guo. Chin. Phys. B 2020, 29, 128502.
- 37 A. Kalra, S. Vura, S. Rathkanthiwar, R. Muralidharan, S. Raghavan, D. N. Nath. Appl. Phys. Express 2018, 11, 064101.
- 38 L. Goswami, N. Aggarwal, P. Vashishtha, S. K. Jain, S. Nirantar, J. Ahmed, M. A. M. Khan, R. Pandey, G. Gupta. Sci. Rep. 2021, 11, 10859.
- 39 Y. Wang, N. Yu. Mater. Res. Express 2020, 6, 1250b7.
- 40 M. Zhou, H. B. Qiu, T. He, J. Y. Zhang, W. X. Yang, S. L. Lu, L. F. Bian, Y. K. Zhao. Phys. Status Solidi A 2020, 217, 6.
- 41 Z. Xing, Y. Zhao, L. Bian, J. Zhang, M. Zhou, W. Yang, Y. Wu, M. Jiang, J. Long, S. Lu. Mater. Adv. 2021, 2, 1006.
- 42 H. D. Sun, M. K. Shakfa, M. M. Muhammed, B. Janjua, K. H. Li, R. H. Lin, T. K. Ng, I. S. Roqan, B. S. Ooi, X. H. Li. ACS Photonics 2018, 5, 964.
- 43 L. G. Feng, Y. F. Li, H. Xiong, S. Wang, J. T. Wang, W. Ding, Y. Zhang, F. Yun. Appl. Phys. Express 2016, 9, 081003.
- 44 X. Dai, A. Messanvi, H. Zhang, C. Durand, J. Eymery, C. Bougerol, F. H. Julien, M. Tchernycheva. Nano Lett. 2015, 15, 6958.
- 45 H. E. Lee, J. Choi, S. H. Lee, M. Jeong, J. H. Shin, D. J. Joe, D. Kim, C. W. Kim, J. H. Park, J. H. Lee, D. Kim, C. S. Shin, K. J. Lee. Adv. Mater. 2018, 30, 1800649.
- 46 J. Zhang, B. Jiao, J. Dai, D. Wu, Z. Wu, L. Bian, Y. Zhao, W. Yang, M. Jiang, S. Lu. Nano Energy 2022, 100, 107437.
- 47 J. H. Lee, S. H. Hahm, J. H. Lee, S. B. Bae, K. S. Lee, Y. H. Cho, J. L. Lee. Appl. Phys. Lett. 2003, 83, 917.
- 48 Y. Zhou, G. H. Wu, Analysis Methods in Materials Science: X-Ray Diffraction and Electron Microscopy in Materials Science, Harbin Institute of Technology Press, Harbin, China 2007.
- 49 L. Zhao, Z. Gao, J. Zhang, L. Lu, W. Yu, P. Hu, J. Liang, D. Zou. J. Mater. Sci. 2018, 53, 14172.
- 50 S. Li, Y. Zhang, W. Yang, H. Liu, X. Fang. Adv. Mater. 2020, 32, 1905443.
- 51 M. Jiang, Y. Zhao, L. Bian, W. Yang, J. Zhang, Y. Wu, M. Zhou, S. Lu, H. Qin. ACS Photonics 2021, 8, 3282.
- 52 Y. Li, Y. Li, J. Chen, Z. Sun, Z. Li, X. Han, P. Li, X. Lin, R. Liu, Y. Ma, W. Huang. J. Mater. Chem. C 2018, 6, 11666.
- 53 M. G. Rabbani, J. P. Sundararajan, A. Verma, R. Nekovei, M. M. Khader, R. B. Darling, S. R. Patil. Semicond. Sci. Technol. 2017, 32, 015001.
- 54 H. Y. Chen, K. W. Liu, X. Chen, Z. Z. Zhang, M. M. Fan, M. M. Jiang, X. H. Xie, H. F. Zhao, D. Z. Shen. J. Mater. Chem. C 2014, 2, 9689.
- 55 T. He, Y. K. Zhao, X. D. Zhang, W. K. Lin, K. Fu, C. Sun, F. F. Shi, X. Y. Ding, G. H. Yu, K. Zhang, S. L. Lu, X. P. Zhang, B. S. Zhang. Nanophotonics 2018, 7, 1557.
- 56 Z. Zheng, L. Gan, H. Q. Li, Y. Ma, Y. Bando, D. Golberg, T. Y. Zhai. Adv. Funct. Mater. 2015, 25, 5885.
- 57 B. Pandit, T. H. Seo, B. D. Ryu, J. Cho. AIP Adv. 2016, 6, 065007.
- 58 D. S. Zheng, H. H. Fang, P. Wang, W. J. Luo, F. Gong, J. C. Ho, X. S. Chen, W. Lu, L. Liao, J. L. Wang, W. D. Hu. Adv. Funct. Mater. 2016, 26, 7690.
- 59 Y. Wang, W. Cui, J. Yu, Y. Zhi, H. Li, Z. Y. Hu, X. Sang, E. J. Guo, W. Tang, Z. Wu. ACS Appl. Mater. Interfaces 2019, 11, 45922.
- 60 W. Y. Kong, G. A. Wu, K. Y. Wang, T. F. Zhang, Y. F. Zou, D. D. Wang, L. B. Luo. Adv. Mater. 2016, 28, 10725.
- 61 W. C. Ding, R. Jia, H. F. Li, C. Chen, Y. Sun, Z. Jin, X. Y. Liu. J. Appl. Phys. 2014, 115, 014307.
- 62 N. Wang, D. Jiang, M. Zhao, X. Zhou, Y. Duan, J. Sun, C. Shan, Q. Li, M. Li, X. Fei, X. Zhao. Nanotechnology 2019, 31, 105706.
- 63 C. Shan, M. Zhao, D. Jiang, Q. Li, M. Li, X. Zhou, Y. Duan, N. Wang, R. Deng. Nanotechnology 2019, 30, 305703.
- 64 H. Chen, P. Wang, H. Ye, H. Yin, L. Rao, D. Luo, X. Hou, G. Zhou, R. Nötzel. Chem. Eng. J. 2021, 406, 126757.
- 65 L. X. Qian, Z. H. Wu, Y. Y. Zhang, P. T. Lai, X. Z. Liu, Y. R. Li. ACS Photonics 2017, 4, 2203.
- 66 S. Cui, Z. Mei, Y. Zhang, H. Liang, X. Du. Adv. Opt. Mater. 2017, 5, 1700454.
- 67 X. H. Ma, Y. Q. Jiang, X. H. Wang, M. Lü, H. Zhang, W. W. Chen, X. Y. Liu. Chin. Phys. B 2014, 23, 017303.
- 68 Y. Chen, Y. Lu, M. Liao, Y. Tian, Q. Liu, C. Gao, X. Yang, C. Shan. Adv. Funct. Mater. 2019, 29, 1906040.
- 69 W. Zhang, D. Y. Jiang, M. Zhao, Y. H. Duan, X. Zhou, X. J. Yang, C. C. Shan, J. M. Qin, S. Gao, Q. C. Liang, J. H. Hou. J. Appl. Phys. 2019, 125, 024502.
- 70 O. Ambacher, J. Majewski, C. Miskys, A. Link, M. Hermann, M. Eickhoff, M. Stutzmann, F. Bernardini, V. Fiorentini, V. Tilak, B. Schaff, L. F. Eastman. J. Phys.: Condens. Matter 2002, 14, 3399.
- 71 L. Al-Maghrabi, C. Huang, D. Priante, M. Tian, J.-W. Min, C. Zhao, H. Zhang, R. C. Subedi, H. H. Alhashim, H. Sun, T. K. Ng, B. S. Ooi. AIP Adv. 2020, 10, 055014.
- 72 M. Sulaman, S. Yang, A. Bukhtiar, P. Tang, Z. Zhang, Y. Song, A. Imran, Y. Jiang, Y. Cui, L. Tang, B. Zou. Adv. Funct. Mater. 2022, 32, 2201527.
- 73 M. Sulaman, S. Yang, Y. Song, A. Bukhtiar, J. Hu, Z. Zhang, Y. Jiang, Y. Cui, L. Tang, B. Zou. Adv. Mater. Interfaces 2022, 9, 2200017.
- 74 R. Songmuang, O. Landré, B. Daudin. Appl. Phys. Lett. 2007, 91, 251902.
- 75 T. Auzelle, B. Haas, A. Minj, C. Bougerol, J. L. Rouvière, A. Cros, J. Colchero, B. Daudin. J. Appl. Phys. 2015, 117, 245303.
- 76 N. Fathima, N. Pradeep, J. Balakrishnan. Bull. Mater. Sci. 2021, 44, 33.
- 77 L. H. Yang, K. R. Lai, B. H. Zhang, X. L. Fu, J. J. Wang, W. Wei. Phys. Status Solidi A 2015, 212, 698.
- 78 S. Rathkanthiwar, A. Kalra, R. Muralidharan, D. N. Nath, S. Raghavan. IEEE Trans. Electron Devices 2020, 67, 4281.
- 79 B. D. Boruah, D. B. Ferry, A. Mukherjee, A. Misra. Nanotechnology 2015, 26, 235703.
- 80 Z. Zheng, F. W. Zhuge, Y. G. Wang, J. B. Zhang, L. Gan, X. Zhou, H. Q. Li, T. Y. Zhai. Adv. Funct. Mater. 2017, 27, 1703115.
- 81 W. Y. Weng, T. J. Hsueh, S. J. Chang, S. B. Wang, H. T. Hsueh, G. J. Huang. IEEE J. Sel. Top. Quantum Electron. 2011, 17, 996.
- 82 Q. Liu, Y. Q. Yang, X. Wang, W. Song, X. Luo, J. Guo, J. Shi, C. Cheng, D. Li, L. He, K. Li, F. Gao, S. Li. J. Alloys Compd. 2021, 864, 158710.
- 83
G. Kalita, M. Kobayashi, M. D. Shaarin, R. D. Mahyavanshi, M. Tanemura. Phys. Status Solidi A 2018, 215, 1800089.
10.1002/pssa.201800089 Google Scholar