Volume 31, Issue 23
Physical Inorganic Chemistry
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ChemInform Abstract: Polycrystalline and Monocrystalline Pore Arrays with Large Interpore Distance in Anodic Alumina.

A. P. Li

A. P. Li

MPI Mikrostrukturphys., D-06120 Halle/S., Germany

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F. Mueller

F. Mueller

MPI Mikrostrukturphys., D-06120 Halle/S., Germany

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U. Goesele

U. Goesele

MPI Mikrostrukturphys., D-06120 Halle/S., Germany

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First published: 08 June 2010

Abstract

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ChemInform Abstract

Polycrystalline self-organized pore arrays are produced by anodizing Al in H3PO4/MeOH/H2O solution (195 V, -4 °C, 20 h). The pore arrays are hexagonally arranged and have an interpore distance of 460 nm. A monocrystalline pore array structure with variable interpore distance is prepared by combining electron-beam lithographic patterning with anodization in oxalic acid under controlled conditions. Very high aspect ratios (≈500) can be achieved by this method.

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