Polydibutylgermane undergoes oxidation reaction and chain scission under X-ray exposure. These reactions are the same as those observed for ultraviolet irradiation. Positive resist patterns can be fabricated by X-ray lithography.

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Volume37, Issue6

20 February 1989

Pages 1589-1593

X-ray-induced reactions and resist features of polydibutylgermane

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X-ray-induced reactions and resist features of polydibutylgermane

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