International Journal of Adaptive Control and Signal Processing

Volume 29, Issue 11 pp. 1459-1474

Recent Advances in Adaptive Methods for Frequency Estimation with Applications

Overview and new results in disturbance observer based adaptive vibration rejection with application to advanced manufacturing

Xu Chen,

Corresponding Author

Xu Chen

Department of Mechanical Engineering, University of Connecticut, Storrs, CT, USA

Correspondence to: Xu Chen, Mechanical Engineering, University of Connecticut, Storrs, CT, USA.

E-mail: [email protected]

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Masayoshi Tomizuka,

Masayoshi Tomizuka

Department of Mechanical Engineering, University of California, Berkeley, CA, USA

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Xu Chen,

Corresponding Author

Xu Chen

Department of Mechanical Engineering, University of Connecticut, Storrs, CT, USA

Correspondence to: Xu Chen, Mechanical Engineering, University of Connecticut, Storrs, CT, USA.

E-mail: [email protected]

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Masayoshi Tomizuka,

Masayoshi Tomizuka

Department of Mechanical Engineering, University of California, Berkeley, CA, USA

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First published: 24 February 2015

https://doi.org/10.1002/acs.2546

Citations: 34

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Summary

Vibrations with unknown and/or time-varying frequencies significantly affect the achievable performance of control systems, particularly in precision engineering and manufacturing applications. This paper provides an overview of disturbance-observer-based adaptive vibration rejection schemes; studies several new results in algorithm design; and discusses new applications in semiconductor manufacturing. We show the construction of inverse-model-based controller parameterization and discuss its benefits in decoupled design, algorithm tuning, and parameter adaptation. Also studied are the formulation of recursive least squares and output-error-based adaptation algorithms, as well as their corresponding scopes of applications. Experiments on a wafer scanner testbed in semiconductor manufacturing prove the effectiveness of the algorithm in high-precision motion control. Copyright © 2015 John Wiley & Sons, Ltd.

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Volume29, Issue11

November 2015

Pages 1459-1474

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Recent Advances in Adaptive Methods for Frequency Estimation with Applications

Overview and new results in disturbance observer based adaptive vibration rejection with application to advanced manufacturing

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Overview and new results in disturbance observer based adaptive vibration rejection with application to advanced manufacturing

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