Two-Step Epitaxy of Gallium Nitride on (0001) Sapphire

S. Mahajan

S. Mahajan

Department of Chemical and Materials Engineering and Center for Solid State Electronics Research Arizona State University Tempe, AZ 85287-6006

Search for more papers by this author
V. Narayanan

V. Narayanan

IBM Thomas J. Watson Research Center Yorktown Heights, NY 10598

Search for more papers by this author
First published: 01 February 2002

Summary

This chapter contains sections titled:

  • Introduction

  • Mechanism of Two-Step Epitaxy

  • Origins of Threading Dislocations

  • Reduction of Densities of Threading Dislocations

  • Summary

  • Acknowledgements

The full text of this article hosted at iucr.org is unavailable due to technical difficulties.