Sol‐Gel Routes to Nanostructured Patterned Ferroelectric Thin Films with Novel Electronic and Optical Functions - Progress in Nanotechnology - Wiley Online Library

Sol-Gel Routes to Nanostructured Patterned Ferroelectric Thin Films with Novel Electronic and Optical Functions

Makoto Kuwabara

Department of Applied Science for Electronics and Materials, Kyushu University, 6-1 Kasuga-kouen, Kasuga 816-8580, Japan

Search for more papers by this author

Yong Jun WU,

Yong Jun WU

Department of Materials Science and Engineering, Zhejiang University, Zheda road 38, Hangzhou 310027, China

Search for more papers by this author

Juan Li,

Juan Li

Search for more papers by this author

T. Koga,

T. Koga

Search for more papers by this author

Makoto Kuwabara,

Makoto Kuwabara

Department of Applied Science for Electronics and Materials, Kyushu University, 6-1 Kasuga-kouen, Kasuga 816-8580, Japan

Search for more papers by this author

Yong Jun WU,

Yong Jun WU

Department of Materials Science and Engineering, Zhejiang University, Zheda road 38, Hangzhou 310027, China

Search for more papers by this author

Juan Li,

Juan Li

Search for more papers by this author

T. Koga,

T. Koga

Search for more papers by this author

The American Ceramic Society,

The American Ceramic Society

Search for more papers by this author

Book Author(s): The American Ceramic Society,

The American Ceramic Society

Search for more papers by this author

First published: 01 December 2009

https://doi.org/10.1002/9780470588246.ch30

Summary

This chapter fabricated barium titanate (BaTiOa: BTO) patterned thin films of < 1 |im in thickness on Pt/Ti/Si substrates by combining an electrophoretic deposition (EPD) method using a suspension of BTO nanoparticles and electron beam lithography, which was used to form resist molds on the substrates. A suspension of BTO nanoparticles for EPD was prepared by dispersing BTO nanocrystals, which were synthesized by a sol-gel process using a high concentration alkoxides solution, in 2-methoxyethanol added with acetylacetone BTO ceramic thin films obtained by firing the EPD green films at various temperatures between 600° and 800°C consisted of particles with diameters within 30 nm, and had a dielectric constant of about 100 and a dielectric loss

References

Y. Yamashita, H. Yamamot, Y. Sakabe, “Dielectric Properties of BaTiO₃ Thin Films Derived from Clear Emulsion of Well-Dispersed Nanosized BaTiO₃ Particles,” Jpn. J. Appl. Phys., 43, 6521–24 (2004).
10.1143/JJAP.43.6521
CAS Web of Science® Google Scholar
K. Tanaka, K. Susuki, D. Fu, K. Nishizawa, T. Miki, and K. Kato, “Grain Size Effect on Dielectric and Piezoelectric Properties of Alkoxy-Derived BaTiCVBased Thin Films,” Jpn. J. Appl. Phys., 43, 6525–29 (2004).
10.1143/JJAP.43.6525
CAS Web of Science® Google Scholar
M. E. Marssi, F. L. Marree, I. A. Lukyanchuk, M. G Karkut, “Ferroelectric transition in an epitaxial barium titanate thin film: Raman spectroscopy and x-ray diffraction study,” J. Appl. Phys., 94, 3307–12 (2003)
Google Scholar
H.Basantaka Sharma, H.N.K. Sarma, and A. Maningh, “Ferroelectric and Dielectric Properties of Sol–Gel Processed Barium Titanate Ceramics and Thin Films,” J. Mater. Sci., 34, 1385–90 (1999).
10.1023/A:1004578905297
Google Scholar
C.L. Jia, M. Siegert, and K. Urban, “The Structure of the Interface Between BaTiO₃ Thin Films and MgO Substrates,” Acta. Mater., 49, 2783–89 (2001).
10.1016/S1359-6454(01)00186-0
CAS Web of Science® Google Scholar
Y. Sakabe, Y. Takeshima, and K. Tanaka, “Multilayer Ceramic Capacitors with Thin (Ba,Sr)TiO₃ Layers by MOCVD,” J. Electroceramies, 3, 115–21 (1999).
10.1023/A:1009986825169
CAS Web of Science® Google Scholar
H. Kozuka, and A. Higuchi, “Single-layer Submicro-thick BaTiO₃ Coating from Poly(vinylpyrrolidone)-coating Sols: Gel-to-ceramic Film Conversion, Densification, and Dielectric Properties,” J. Mater. Res., 16, 3116–23 (2001).
10.1557/JMR.2001.0430
CAS Web of Science® Google Scholar
P. Sarkar, and P. S. Nicholson, “Electrophoretic Deposition (EPD): Mechanisms, Kinetics, and Application to Ceramics,” J. Am. Ceram. Soc., 79, 1987–2002 (1996).
10.1111/j.1151-2916.1996.tb08929.x
CAS Web of Science® Google Scholar
I. Zhitomirsky, and A. Petric, “Electrolytic and Electrophoretic Deposition of CeO₂ Films,” Mater. Lett., 40, 263–68 (1999)
10.1016/S0167-577X(99)00087-7
CAS Web of Science® Google Scholar
S. Okamura, T. Tsukamoto, and N. Koura, “Fabrication of Ferroelectric BaTiO₃ Films by Electrocphoretic Deposition,” Jpn. J. Appl Phys., 32, 4182–85 (1993).
10.1143/JJAP.32.4182
CAS Web of Science® Google Scholar
R. Louh, and Y. Hsu, “Fabrication of Barium Titanate ferroelectric Layers by Electrophoretic Deposition Technique,” Mater. Chem. and Phys., 79, 226–69 (2003).
10.1016/S0254-0584(02)00264-X
CAS Web of Science® Google Scholar
M. Nagai, K. Yamashita, T. Umegaki, and Y. Takuma, “Electrophoretic Deposition of Ferroelectric Barium Titanate Thick Films and Their Dielectric Properties,” J. Am. Ceram, Soc., 76, 253–55 (1993).
10.1111/j.1151-2916.1993.tb03720.x
CAS Web of Science® Google Scholar
J. Li, Y.J. Wu, H. Tanaka, T. Yamamoto and M. Kuwabara, “Preparation of Mono-dispersed Suspension of Barium Titanate Nanoparticles and Electrophoretic Deposition of Thin films”, J. Am. Ceram. Soc., 87, 1578–81 (2004).
10.1111/j.1551-2916.2004.01578.x
CAS Web of Science® Google Scholar
M. Alexe, C. Harnagea, and D. Hesse, “Non-conventional Micro- and Nanopatterning Techniques for Electroceramics,” J. Electrceramies, 12, 69–88 (2004).
10.1023/B:JECR.0000034002.31773.9e
CAS Web of Science® Google Scholar
J. Baborowski, “Microfabrication of Piezoelectric MEMS,” J. Electrceramies, 12, 33–51 (2004).
10.1023/B:JECR.0000034000.11787.90
CAS Web of Science® Google Scholar
H. Shimooka, and M. Kuwabara, “Preparation of Dense BaTiO₃ Ceramics from Sol-Gel-Derived Monolithic Gels,”J. Am. Ceram. Soc., 78, 2849–52 (1995).
10.1111/j.1151-2916.1995.tb08066.x
CAS Web of Science® Google Scholar
H. Shimooka, and M. Kuwabara, “Crystallinity and Stoichiometry of Nano-structured Sol-Gel-Derived BaTiO₃ Monolithic Gels,” J. Am. Ceram. Soc., 79, 2983–85 (1996).
10.1111/j.1151-2916.1996.tb08739.x
CAS Web of Science® Google Scholar

Progress in Nanotechnology: Processing