Volume 188, Issue 3 pp. 1105-1113
Original Paper

An Experimental Study of AlGaAs/GaAs Heterostructures Using an Advanced Transient Charge Processor

K. Gmucová

K. Gmucová

Institute of Physics, Department of Applied Physics, Slovak Academy of Sciences, Dúbravská cesta 9, 84228 Bratislava, Slovak Republic

Search for more papers by this author
O. Csabay

O. Csabay

Faculty of Electrical Engineering and Information Technology, Department of Microelectronics, Slovak Technical University, Ilkovičova 3, 81219 Bratislava, Slovak Republic

Search for more papers by this author
I. Thurzo

I. Thurzo

Institute of Physics, Department of Applied Physics, Slovak Academy of Sciences, Dúbravská cesta 9, 84228 Bratislava, Slovak Republic

Search for more papers by this author
L. Harmatha

L. Harmatha

Faculty of Electrical Engineering and Information Technology, Department of Microelectronics, Slovak Technical University, Ilkovičova 3, 81219 Bratislava, Slovak Republic

Search for more papers by this author

Abstract

A versatile time-domain spectrometer that combines both the correlation DLTS and CV techniques, is used to study two types of AlGaAs/GaAs heterostructures — a heterostructure with a quantum well, and a heterostructure with intentionally introduced DX centres. Bistable properties of the so-called thermal donor are treated by both above mentioned techniques. Some evidence for the presence of two different structural configurations of a DX centre in the same charge state is given. The nature of the DX centre related signal in the DLTS spectrum is studied by the correlation DLTS method. It is found that the decomposition of this signal into two closely spaced energy levels is justified for the set of chosen rate windows. A good agreement of the experimental and theoretical DLTS signals is achieved. Prolonged positive biasing of the structures with a quantum well at elevated temperatures led to a temporary annealing out of thermal donors. According to the CV data, the thermal donors are expected to be positioned at the bottom AlGaAs/GaAs buffer interface.

The full text of this article hosted at iucr.org is unavailable due to technical difficulties.