Volume 180, Issue 2 pp. 479-485

Original Paper

Comparative Study of the Surface Roughness by AFM and GIXR

D. Żymierska,

D. Żymierska

[email protected]

Institute of Physics, Polish Academy of Sciences, Al. Lotników 32/46, PL-02-668 Warsaw, Poland

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J. Auleytner,

J. Auleytner

Institute of Physics, Polish Academy of Sciences, Al. Lotników 32/46, PL-02-668 Warsaw, Poland

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T. Kobiela,

T. Kobiela

Institute of Physical Chemistry, Polish Academy of Sciences, ul. Kasprzaka 44/52, PL-01-224 Warsaw, Poland

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R. Duś,

R. Duś

Institute of Physical Chemistry, Polish Academy of Sciences, ul. Kasprzaka 44/52, PL-01-224 Warsaw, Poland

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D. Żymierska,

D. Żymierska

[email protected]

Institute of Physics, Polish Academy of Sciences, Al. Lotników 32/46, PL-02-668 Warsaw, Poland

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J. Auleytner,

J. Auleytner

Institute of Physics, Polish Academy of Sciences, Al. Lotników 32/46, PL-02-668 Warsaw, Poland

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T. Kobiela,

T. Kobiela

Institute of Physical Chemistry, Polish Academy of Sciences, ul. Kasprzaka 44/52, PL-01-224 Warsaw, Poland

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R. Duś,

R. Duś

Institute of Physical Chemistry, Polish Academy of Sciences, ul. Kasprzaka 44/52, PL-01-224 Warsaw, Poland

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First published: 25 August 2000

https://doi.org/10.1002/1521-396X(200008)180:2<479::AID-PSSA479>3.0.CO;2-U

Citations: 6

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Abstract

The comparative analysis of surface roughness determined by using two complementary methods, the grazing incidence X-ray reflectometry (GIXR) and the atomic force microscopy (AFM), is presented. The (100) surfaces of different GaAs single crystals grown by the Czochralski method were investigated. The experimental X-ray data were compared with computer simulations basing on the Fresnel theory.

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Volume180, Issue2

August 2000

Pages 479-485

Comparative Study of the Surface Roughness by AFM and GIXR

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Comparative Study of the Surface Roughness by AFM and GIXR

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