Photolithography
Kevin D. Lucas,
Clifford L. Henderson, Andrzej J. Strojwas,
Kevin D. Lucas
Motorola Advanced Process Development and External Research Laboratory
Search for more papers by this authorKevin D. Lucas,
Clifford L. Henderson, Andrzej J. Strojwas,
Kevin D. Lucas
Motorola Advanced Process Development and External Research Laboratory
Search for more papers by this authorFirst published: 27 December 1999
Abstract
The sections in this article are
- 1 Overview of Optical Lithography
- 2 Patterning Issues
- 3 Optical Lithography Extensions
- 4 Successors to Optical Lithography
- 5 Conclusion
- 6 Acknowledgments
Bibliography
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