Semiconductor Manufacturing Scheduling

P. R. Kumar

P. R. Kumar

University of Illinois at Urbana-Champaign, Urbana, IL

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Sunil Kumar

Sunil Kumar

Stanford University, Stanford, CA

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First published: 27 December 1999

Abstract

The sections in this article are

  • 1 Scheduling Semiconductor Fabs
  • 2 Implementation
  • 3 Summary

The full text of this article hosted at iucr.org is unavailable due to technical difficulties.