Fuzzy Logic For Semiconductor Manufacturing

1 L. A. Zadeh Fuzzy set, in Information Control, New York: Academic Press, 1965, Vol. 8, pp. 338–353.
Google Scholar
2 H. Li M. M. Gupta (eds.) Fuzzy Logic and Intelligent Systems, Norwell, MA: Kluwer, 1995.
Google Scholar
3 K. J. Astrom B. Wittenmark Computer Controlled Systems, Theory and Design, Englewood Cliffs, NJ: Prentice-Hall, 1984.
Google Scholar
4 H. Li N. Godfrey A beam-and-ball controller prototype, IEEE Macro, 15 (6): 64, 1995.
10.1109/MM.1995.476263
CAS Web of Science® Google Scholar
5 S. H. Huang et al. Function approximation and neural-fuzzy approach to machining process selection, IEEE Trans. Compon. Packag. Manuf. Technol. C, 19: 9, 1996.
10.1109/3476.484200
Web of Science® Google Scholar
6 H. Li B. Vaidhyanathan S. Sun Statistical fuzzy PID controller design, Proc. 6th IEEE Int. Conf. Fuzzy Systems, vol. III, pp. 1499–1504.
Google Scholar
7 M. Parekh et al. In-line control of nonlinear pH neutralization based on fuzzy logic, IEEE Trans. Compon. Packag. Manuf. Technol. A, 17: 192–201, 1994.
10.1109/95.296400
CAS Web of Science® Google Scholar
8 H. Xie et al. Process optimization using a fuzzy logic response surface method, IEEE Trans. Compon. Packag. Manuf. Technol. A, 17: 202–211, 1994.
10.1109/95.296401
Web of Science® Google Scholar

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