Flexible Semiconductor Manufacturing

Douglas A. Bodner

H. Milton Stewart School of Industrial and Systems Engineering Georgia Institute of Technology, 765 Ferst Dr. NW, Atlanta, GA, GA 30332-0205

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Spyros A. Reveliotis,

Spyros A. Reveliotis

H. Milton Stewart School of Industrial and Systems Engineering Georgia Institute of Technology, 765 Ferst Dr. NW, Atlanta, GA, GA 30332-0205

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Ronald L. Billings,

Ronald L. Billings

H. Milton Stewart School of Industrial and Systems Engineering Georgia Institute of Technology, 765 Ferst Dr. NW, Atlanta, GA, GA 30332-0205

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Douglas A. Bodner,

Douglas A. Bodner

H. Milton Stewart School of Industrial and Systems Engineering Georgia Institute of Technology, 765 Ferst Dr. NW, Atlanta, GA, GA 30332-0205

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Spyros A. Reveliotis,

Spyros A. Reveliotis

H. Milton Stewart School of Industrial and Systems Engineering Georgia Institute of Technology, 765 Ferst Dr. NW, Atlanta, GA, GA 30332-0205

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Ronald L. Billings,

Ronald L. Billings

H. Milton Stewart School of Industrial and Systems Engineering Georgia Institute of Technology, 765 Ferst Dr. NW, Atlanta, GA, GA 30332-0205

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First published: 27 December 1999

https://doi.org/10.1002/047134608X.W7015

Citations: 5

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Abstract

The sections in this article are

1 Flexible Automation and Semiconductor Manufacturing
2 Theory and Current Industry Practice
3 Design Methodologies and Performance Evaluation
4 Evaluation and Future Research
5 Additional Information

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