Chemical Vapor Deposition

Nitin Ingle

Nitin Ingle

University of Wisconsin—Madison, Madison, WI

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Thomas F. Kuech

Thomas F. Kuech

University of Wisconsin—Madison, Madison, WI

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Michael A. Tischler

Michael A. Tischler

Epitronics, Inc.

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First published: 27 December 1999
Citations: 1

Abstract

The sections in this article are

  • 1 The CVD Process
  • 2 CVD Techniques
  • 3 Flow Regimes
  • 4 Mixed Convection Phenomena
  • 5 CVD Chemistry
  • 6 Summary

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